Products Home / Optomechanical Components / Vacuum Components / Vacuum-Compatible Motorized ActuatorsVacuum-Compatible Motorized Actuators
- Vacuum-Compatible Down to 10-6 Torr
- Precision DC Servo Motor Actuators
- Options with 1/4"-80 Thread or Ø3/8" Barrel Fitting
Z912BV
12 mm Travel Ø3/8" Barrel
Z912V
12 mm Travel
1/4"-80 Threading
Z906V
6 mm Travel
1/4"-80 Threading
Z925BV
25 mm Travel Ø3/8" Barrel
Please Wait
| Common Specificationsa | |
|---|---|
| Encoder Resolutionb | 34,555 counts/mm (Linear Displacement) |
| Maximum Pushing Force | 45 N |
| Minimum Repeatable Incremental Movement | 0.2 µm |
| Maximum Speedc | 2.6 mm/s |
| Maximum Acceleration | 4 mm/s2 |
| Maximum Phase to Phase Resistance | 33.0 Ω |
| Maximum Phase to Phase Inductance | 0.6 mH |
| Tested Lifetimed | >100,000 In and Out Cycles |
| Operating Temperature Range | 41 to 104 °F (5 to 40 °C) |
| Vacuum Rating | 10-6 Torr |
| Motor Typee | DC Servo |
| Required Controller | KDC101 |
Required Controller
KDC101
- 34,555 Microsteps per Revolution
- 15 V Output at 2.5 W
- Trapezoidal Velocity Profile
Features
- Drop-In Replacement for Manual Actuators with 1/4"-80 Thread or Ø3/8" Barrels
- DC Servo Actuators with 6, 12, or 25 mm of Travel
- Minimum Resolution of About 29 nm
- Maximum Operating Speed: 2.6 mm/s
- Limit Switches for Zero Datum and Actuator Protection
- Vacuum-Rated to 10-6 Torr
These vacuum-compatible, motorized actuators provide 6 mm, 12 mm, or 25 mm of travel for use with mirror mounts and stages. With vacuum-rated servo motors, phosphorous bronze internal coupling mechanisms and mounting bushings, and high-vacuum grease (see Item # GKZ8 below), these actuators can be used at pressures down to 10-6 Torr.
Click to Enlarge
Custom vacuum-compatible LNR25 series stages can be ordered for use with Z925BV actuators.
Commercial limit switches have been added to provide overdrive protection and accurate home positioning. The incorporated motor is capable of speeds up to 2.6 mm/s, but a maximum speed of 2.3 mm/s is recommended in order to maintain the specified control. The precision of the encoder (512 counts/rev) results in a minimum resolution of about 29 nm (see the Calculations tab for more information).
The motorized actuators can replace manual adjusters in stages and mirror mounts. The Z906V and Z912V actuators are used with 1/4"-80-threaded fittings, while the Z912BV and Z825BV actuators are used with Ø3/8” barrel fittings. To use these actuators, simply remove the existing manual adjuster from the mount, and either thread or clamp in the vacuum-compatible actuator. To order vacuum-compatible versions of our stages and mirror mounts, please contact Technical Support.
The vacuum-compatible actuators are each shipped with a vacuum-compatible flat ribbon cable with an IDC connector. A converter cable for use with the KDC101 controller is also supplied, but this is not vacuum compatible and should only be used outside the chamber.
The KDC101 DC Servo Controller is the required driver for the Z9 series actuators. The latest version of the Kinesis software can be downloaded here. Firmware version 2.2.8 or higher and Kinesis software version 1.14.44 or higher are required for using the KDC101 with the Z9 vacuum-compatible actuators.
| Item # | Z906V | Z912V | Z912BV | Z925BV |
|---|---|---|---|---|
| Mounting Barrel | 1/4"-80 Threaded | Ø3/8" (9.5 mm) Smooth | ||
| Travel Range | 6 mm (0.24") | 12 mm (0.47") | 25 mm (0.98") | |
| Homing Repeatability | ±5 µm | ±6 µm | ±9 µm | |
| Uncompensated Backlash | 6 µm | 13 µm | 13 µm | |
| Uncompensated Bidrectional Repeatability | ±3 µm | ±7 µm | ±7 µm | |
| Residual Backlash after Compensationa | 0.1 µm | 0.7 µm | 0.7 µm | |
| Compensated Bidirectional Repeatability | ±0.3 µm | ±0.7 µm | ±0.8 µm | |
| Travel Accuracyb | 6 µm | 9 µm | 40 µm | |
| Encoder Resolutionc | 34,555 counts/mm (Linear Displacement) |
|||
| Maximum Pushing Force | 45 N | |||
| Minimum Repeatable Incremental Movement | 0.2 µm | |||
| Maximum Speedd | 2.6 mm/s | |||
| Maximum Acceleration | 4 mm/s2 | |||
| Maximum Phase to Phase Resistance | 33.0 Ω | |||
| Maximum Phase to Phase Inductance | 0.6 mH | |||
| Tested Lifetimee | >100,000 In and Out Cycles | |||
| Operating Temperature Range | 41° to 104° F (5° to 40° C) |
|||
| Vacuum Rating | 10-6 Torr | |||
| Weight | 80 g | 94 g | ||
| Motor Typef | DC Servo | |||
| Cable Length | 485.0 mm (19.09") | |||
| Required Controller | KDC101 | |||
How to Calculate the Linear Displacement per Encoder Count
For these vacuum-compatible actuators, there are 512 encoder counts per revolution of the motor. The output shaft of the motor goes into a 67.49:1 planetary gear head. This requires the motor to rotate 67.49 times to rotate the 1.0 mm pitch lead screw one revolution. The end result is the lead screw advances by 1.0 mm.
The linear displacement of the actuator per encoder count is given by
512 x 67.49 = 34,555 encoder counts per revolution of the lead screw,
whereas the linear displacement of the lead screw per encoder count is given by
1.0 mm / 34,555 counts = 2.9 x 10-5 mm (29 nm).
The vacuum-compatible cable integrated with these actuators is terminated in a female IDC 10-Pin socket connector. A short converter cable, which adapts this female IDC socket connector to a D-type male HD15 pin connector, is included with each actuator to facilitate connecting it to the recommended KDC101 controller. This converter cable, whose terminating connectors are shown below, is not vacuum compatible. Information describing the pin assignments for both the female IDC socket and male D-type HD connector (when it is connected to the female IDC socket connector) follows.
Pin Diagram
10 Pin Female IDC Socket Connector
(Amphenol T812 Series, 2.54 mm Pitch)
Female IDC 10-Pin Connector Pin Out
| Pin | Description | Pin | Description |
|---|---|---|---|
| 1 | Motor (+) | 6 | Motor (-) |
| 2 | Vcc | 7 | Limit Ground |
| 3 | Channel A | 8 | Reverse Limit |
| 4 | Channel B | 9 | Forward Limit |
| 5 | Ground | 10 | Not Connected |
Pin Diagram
High-Density D-Type Male 15 Pin Connector
Male HDDB15 Connector Pin Out
| Pin | Description | Pin | Description |
|---|---|---|---|
| 1 | Ground (Limit and Vcc) | 8 | Reserved For Future Use |
| 2 | Forward Limit | 9 | Ident Resistor |
| 3 | Reverse Limit | 10 | Vcc (+5 VDC) |
| 4 | Reserved For Future Use | 11 | Encoder Channel A |
| 5 | Motor (-) | 12 | Reserved for Future Use |
| 6 | Reserved for Future Use | 13 | Encoder Channel B |
| 7 | Motor (+) | 14, 15 | Reserved For Future Use |
Click to Enlarge
Connectors terminating the converter cable. The image on the left shows the high-density D-type male 15-pin connector, and the image on the right shows the 10-pin male IDC socket connector.
| Posted Comments: | |
Benjamin Peller
(posted 2024-03-25 16:10:17.36) Does this actuator rotate? If not, are there options for vacuum actuators that both translate linearly and rotate? spolineni
(posted 2024-04-03 09:04:11.0) Thank you for contacting us. These vacuum-compatible, motorized actuators provide 6 mm, 12 mm, or 25 mm of linear travel for mirror mounts and stages. In addition, the leadscrew does rotate as it extends/retracts. I will contact you directly to provide further details for your application. Jorge Ferreira
(posted 2021-03-09 18:17:10.86) Vacuum-Compatible Motorized Actuators
Do you have an application for this actuator to control the Butterfly valve or gas inlet valve?
Best
Jorge DJayasuriya
(posted 2021-03-15 04:49:44.0) thank you for your inquiry Jorge. We will get in touch with you directly to discuss your application. user
(posted 2020-09-23 14:36:07.593) The connectors on the actuator are not standard for vacuum - would be much better if DB9 or DB15 female - in order to match standard feedthroughs. Appears to be made from PBT which (seems to be vacuum compatible, but not the best or standard). This non-standard connector causes a lot of trouble and engr cost for customers (and Thorlabs as we have to contact you to figure this out and find adapters). If you must stay with this connector, please consider at the very least including the necessary male connector for vacuum in the box (and for sale on your website as well in case we damage one during mfg). Thank you. cwright
(posted 2020-09-28 09:36:55.0) Response from Charles at Thorlabs: Hello and thank you for your feedback voicing your concerns. Our engineering team has seen this feedback and will consider it accordingly in any future design revisions. While we have found that end users often have their own specific preference given the variety of feedthroughs on the market, many even with DIY solutions to perfectly fulfil their special needs, we do acknowledge that a providing a common connector such as DB9 could help some users. gruning
(posted 2017-06-06 18:23:05.84) Hello,
I'm currently looking for vacuum compatible motorized translation stages and actuators for mirror mounts.
I only found vacuum compatibility down to 10^-6 Torr however I need 10^-7 mbar (7.5x10^-8 Torr). Are you able to provide motorized elements down to this pressure ?
Thank you.
Regards bwood
(posted 2017-06-07 06:28:15.0) Response from Ben at Thorlabs: Thank you for your question. Unfortunately, the motors used in these actuators is limited to 10^-6 Torr, and so we can't provide a motor for lower vacuum levels at this moment in time. However, we will note this requirement with our engineers, to inform future projects. |
Zoom- Vacuum-Compatible DC Servo Actuator
- Submicron Resolution
- Drop-In Replacement for Manual Adjusters with 1/4"-80 Threading or Ø3/8" Barrels
- Travel Lengths of 6 mm, 12 mm, or 25 mm
Thorlabs offers this series of vacuum-compatible motorized actuators available in travel lengths of 6 mm, 12 mm, and 25 mm. The actuators allow very small step sizes over the entire travel range, providing flexibility with negligible backlash and fine resolution (see the Specs tab for details). The Z906V and Z912V can easily replace any manual adjuster with 1/4"-80 threads, while the Z912BV and Z925BV can replace any actuator with Ø3/8" barrel fittings. The DC servo motor allows for continuously variable speeds while the optical encoder allows closed-loop operation.
These actuators are light, compact, and extremely durable. They are ideal for use with a wide range of components including mirror mounts, translation stages, and other items that require higher precision than most common drive mechanisms can provide.
Zoom- 1.5 cc Syringe of Apiezon 100 Grease
- Vacuum-Compatible Grease to 10-9 Torr
- Prolongs Actuator Lifetime
- Ready to Dispense
This Apiezon grease, which is ideal for re-lubricating the leadscrew threads of our Z9, ZFS, and ZST actuators, has excellent anti-seize properties. It contains PTFE for higher lubricity, is recommended for both general use and vacuum applications down to 10-9 Torr, and has an optimal working range of 10 °C to 30 °C (50 °F to 86 °F). The grease comes in a syringe for easy application.
Note: It is recommended that the lead screw and end ball of the Z9, ZFS, and ZST actuators are lubricated every 10,000 cycles or whenever a squeaking noise is heard during motion.
Vacuum-Compatible DC Servo Actuators