MEMS-VCSEL Swept-Wavelength Laser Sources

VCSEL Overview
Vertical Cavity Surface Emitting Lasers (VCSELs) are semiconductor-based devices that emit light perpendicular to the chip surface, as shown in Figure 1. VCSELs were originally developed as low-cost, low-power alternatives to edge-emitting diodes, mainly for high-volume datacom applications. Quickly thereafter, the advantages of VCSELs became evident, leading them to being preferred light sources over edge-emitters in many applications. Compared to edge-emitting sources, VCSELs offer superior output beam quality and single mode operation.

MEMS-tunable VCSELs utilize microelectromechanical mirror systems (MEMS) to vary the cavity length of the laser, thereby tuning the output wavelength. MEMS-tunable VCSELs have existed for several years; however, the limited tuning range and output power of these devices have precluded them from being used in OCT applications. Praevium Research, in cooperation with Thorlabs and MIT, has since developed a MEMS-tunable VSCEL design that overcomes these previous limitations.

In order for a MEMS-tunable VCSEL to be successful for applications in OCT, it needs to meet certain standards:

• Rapid Sweep Speed
• Broad Tuning Range
• Long Coherence Length
• High Laser Output Power

Rapid Sweep Speed
Applications using OCT demand high-speed imaging without sacrificing imaging quality. Fast imaging rates allow better time resolution, dense collection of 3D datasets, and decreased laser exposure times to the sample.

Currently, there exist a few swept-source lasers that offer high-speed scanning. Fourier domain mode-locked lasers, for example, achieve extremely high imaging speeds but require the use of very long fiber optic delays in the laser cavity and can only operate in wavelength ranges where the fiber loss is low. Of the commercially available high-speed swept lasers, many operate with multiple longitudinal modes or have long cavity lengths, which limit coherence length or tuning speed, respectively.

The low mass of the MEMS-tuning mirror in a MEMS-based tunable VCSEL and the short cavity length both contribute to its high-speed operation. The short cavity length also places only one mode in the gain spectrum, enabling single-mode continuous operation. We have recently measured greater than 500 kHz sweep rates using a MEMS-tunable VCSEL prototype, without using optical multiplexing to increase the sweep speed.

Broad Tuning Range
High-resolution imaging depends on the overall tuning bandwidth of the swept-source laser. Praevium boasts the broadest bandwidth MEMS-tunable VCSEL that has ever been developed. A unique design incorporating broadband, fully oxidized mirrors, as well as wideband gain regions and thin active regions, has currently resulted in greater than 100 nm of continuous mode-hop-free tuning, centered around 1300 nm. For details, please see Figure 3.

Click to Enlarge
Figure 4: Spectrum of MEMS-tunable VCSEL operating at 200 kHz, with a center wavelength around 1310 nm, and post amplification using a BOA.

Long Coherence Length
A significant limitation to most OCT systems is the depth of view (maximum imaging depth range). Especially in clinical applications, where sample thickness, patient motion, and sample location cannot be controlled, a long depth of view is advantageous. A long coherence length alone, however, is not enough. Image sensitivity needs to be virtually unaffected throughout the entire depth. Due to the micron-scale cavity length of the VCSEL and single mode, mode-hop-free operation, we have measured coherence lengths of greater than 100 mm from our MEMS-tunable VCSEL with nearly no signal degradation. Currently limited by detector bandwidth, we are confident that the MEMS-tunable VCSEL is able to achieve even longer imaging depths than have been measured to date. This remarkable depth of view will not only benefit the medical imaging community but also open doors to other applications such as large objective surface profiling, fast frequency domain reflectometry, and fast spectroscopic measurements with high spectral resolution.

High Output Power
Increased imaging speed often comes at the cost of decreased output power and/or optical power on the sample. One advantage of edge-emitting light sources over VCSELs is that they can emit greater output powers. As a general rule, most OCT imaging applications need a minimum of 20 mW of laser output power to maintain image quality when operating at faster scan rates. To reach this goal, the MEMS-tunable VCSEL is coupled with a booster optical amplifier (BOA) to achieve greater than 25 mW of power. An additional advantage of this post-amplification scheme is that the BOA reshapes the MEMS-VCSEL output spectrum such that it is much more uniform.

Additional Considerations and Manufacturing Capabilities
A special feature of the MEMS-tunable VCSEL is that it is scalable for different wavelengths. Through innovative combinations of gain materials and dielectric mirrors, a wide wavelength range in the visible or near infrared can be reached, enabling expansion of this new family of light sources.

As we further develop this light source, we look forward to finding new and exciting applications for its use. Please contact us to discuss how a MEMS-tunable VCSEL may advance your research.

Fabrication of a MEMS-Tunable VCSEL

Laser Safety and Classification

Safe practices and proper usage of safety equipment should be taken into consideration when operating lasers. The eye is susceptible to injury, even from very low levels of laser light. Thorlabs offers a range of laser safety accessories that can be used to reduce the risk of accidents or injuries. Laser emission in the visible and near infrared spectral ranges has the greatest potential for retinal injury, as the cornea and lens are transparent to those wavelengths, and the lens can focus the laser energy onto the retina. 

Safe Practices and Light Safety Accessories

• Laser safety eyewear must be worn whenever working with Class 3 or 4 lasers.
• Regardless of laser class, Thorlabs recommends the use of laser safety eyewear whenever working with laser beams with non-negligible powers, since metallic tools such as screwdrivers can accidentally redirect a beam.
• Laser goggles designed for specific wavelengths should be clearly available near laser setups to protect the wearer from unintentional laser reflections.
• Goggles are marked with the wavelength range over which protection is afforded and the minimum optical density within that range.
• Laser Safety Curtains and Laser Safety Fabric shield other parts of the lab from high energy lasers.
• Blackout Materials can prevent direct or reflected light from leaving the experimental setup area.
• Thorlabs' Enclosure Systems can be used to contain optical setups to isolate or minimize laser hazards.
• A fiber-pigtailed laser should always be turned off before connecting it to or disconnecting it from another fiber, especially when the laser is at power levels above 10 mW.
• All beams should be terminated at the edge of the table, and laboratory doors should be closed whenever a laser is in use.
• Do not place laser beams at eye level.
• Carry out experiments on an optical table such that all laser beams travel horizontally.
• Remove unnecessary reflective items such as reflective jewelry (e.g., rings, watches, etc.) while working near the beam path.
• Be aware that lenses and other optical devices may reflect a portion of the incident beam from the front or rear surface.
• Operate a laser at the minimum power necessary for any operation.
• If possible, reduce the output power of a laser during alignment procedures.
• Use beam shutters and filters to reduce the beam power.
• Post appropriate warning signs or labels near laser setups or rooms.
• Use a laser sign with a lightbox if operating Class 3R or 4 lasers (i.e., lasers requiring the use of a safety interlock).
• Do not use Laser Viewing Cards in place of a proper Beam Trap.

Laser Classification

Lasers are categorized into different classes according to their ability to cause eye and other damage. The International Electrotechnical Commission (IEC) is a global organization that prepares and publishes international standards for all electrical, electronic, and related technologies. The IEC document 60825-1 outlines the safety of laser products. A description of each class of laser is given below:

Class	Description	Warning Label
1	This class of laser is safe under all conditions of normal use, including use with optical instruments for intrabeam viewing. Lasers in this class do not emit radiation at levels that may cause injury during normal operation, and therefore the maximum permissible exposure (MPE) cannot be exceeded. Class 1 lasers can also include enclosed, high-power lasers where exposure to the radiation is not possible without opening or shutting down the laser.
1M	Class 1M lasers are safe except when used in conjunction with optical components such as telescopes and microscopes. Lasers belonging to this class emit large-diameter or divergent beams, and the MPE cannot normally be exceeded unless focusing or imaging optics are used to narrow the beam. However, if the beam is refocused, the hazard may be increased and the class may be changed accordingly.
2	Class 2 lasers, which are limited to 1 mW of visible continuous-wave radiation, are safe because the blink reflex will limit the exposure in the eye to 0.25 seconds. This category only applies to visible radiation (400 - 700 nm).
2M	Because of the blink reflex, this class of laser is classified as safe as long as the beam is not viewed through optical instruments. This laser class also applies to larger-diameter or diverging laser beams.
3R	Class 3R lasers produce visible and invisible light that is hazardous under direct and specular-reflection viewing conditions. Eye injuries may occur if you directly view the beam, especially when using optical instruments. Lasers in this class are considered safe as long as they are handled with restricted beam viewing. The MPE can be exceeded with this class of laser; however, this presents a low risk level to injury. Visible, continuous-wave lasers in this class are limited to 5 mW of output power.
3B	Class 3B lasers are hazardous to the eye if exposed directly. Diffuse reflections are usually not harmful, but may be when using higher-power Class 3B lasers. Safe handling of devices in this class includes wearing protective eyewear where direct viewing of the laser beam may occur. Lasers of this class must be equipped with a key switch and a safety interlock; moreover, laser safety signs should be used, such that the laser cannot be used without the safety light turning on. Laser products with power output near the upper range of Class 3B may also cause skin burns.
4	This class of laser may cause damage to the skin, and also to the eye, even from the viewing of diffuse reflections. These hazards may also apply to indirect or non-specular reflections of the beam, even from apparently matte surfaces. Great care must be taken when handling these lasers. They also represent a fire risk, because they may ignite combustible material. Class 4 lasers must be equipped with a key switch and a safety interlock.
All class 2 lasers (and higher) must display, in addition to the corresponding sign above, this triangular warning sign.