ORIC® 20 mm Linear Translation Stages with Piezoelectric Inertia Drive

Linear Stages with Open- or Closed-Loop Positioning
3 kg Horizontal Load Capacity
Stackable Design for Compact 1-, 2-, or 3-Axis Setups

PD1

Piezo Inertia Stage

Application Idea

PD1D and PD1 Stages
in an XYZ Configuration

PDX1A

Low-Profile Piezo Inertia Stage
with Optical Encoder

PD1D

Monolithic 2-Axis
Piezo Inertia Stage

U.S. Patent 11,606,045

Please Wait

Overview
Specs
Pin Diagrams
PDXC Software
Kinesis Software
Kinesis Tutorials
Open-Loop Stage Setup
Feedback
Motorized Linear Stages

ORIC^® Piezo Inertia Stage Selection Guide
4.5 mm Vertical Translation Stage
5 mm Linear Translation Stages
20 mm Linear Translation Stages
50 mm Linear Translation Stage
Rotation Stages
Vacuum-Compatible Stages

Quick Links
Linear Stage
Vacuum-Compatible Linear Stage
Monolithic XY Stage
Linear Stage with Optical Encoder
Low-Profile Linear Stage with Optical Encoder
Vacuum-Compatible, Low-Profile Linear Stage with Optical Encoder
Adapters
Controllers

Click to Enlarge
XY + rotation stage created by mounting two PD1(/M) linear stages on a PDR1(/M) rotation stage using the included accessories.

Click to Enlarge
A right-angle prism mounted on PDX1 stages in XY configuration using a PM3 clamping arm.

Features

Compact Stainless Steel Stages with Piezo Inertia Drives
Ideal for OEMs and Set-and-Hold Applications that Require Relative Positioning with High Resolution
Several Stage Varieties Available (See Table to the Right)
Top Plate Adapters Provide Alternative Mounting Hole Patterns
Mounting Adapters Provide Flat Surfaces for Mounting Stages
Right-Angle Bracket Adapter Allows Vertical Mounting and XYZ Configurations
Requires a Piezo Inertia Stage Controller (Sold Separately Below)

Thorlabs' ORIC^® 20 mm Linear Travel Piezoelectric Inertia Drive Stages (U.S. Patent 11,606,045) provide fast and stable piezo-controlled linear motion in compact packages with no backlash. The piezo inertia drive mechanism of these stages is self-locking when the stage is at rest and no power is supplied to the piezo, making these stages ideal for set-and-hold applications that require nanometer resolution and long-term alignment stability. All stages have a horizontal load capacity of 3 kg.

The PD1(/M) single-axis and PD1D(/M) monolithic XY stages provide open-loop operation, while the PDX1(/M) and PDX1A(/M) single-axis stages feature optical encoders and support open- and closed-loop operation. Vacuum-compatible versions of the PD1(/M) and PDX1A(/M) stages which use flying leads instead of an SMC or D-sub connector, are also available. The PDX1A(/M) and PDX1AV(/M) 20 mm stages are lower-profile formats of the PDX1(/M) stages with the same mounting features, but with different performance specifications, such as accuracy and minimum step size; see the Specs tab for more details.

Load Mounting Options
The load can be secured to the stage's moving platform using 2-56 (M2 x 0.4) threaded holes or 8-32 (M4 x 0.7) threaded holes. The PD1D(/M) XY stage also offers #2 (M2) and #8 (M4) counterbores for mounting. Alternatively, the PD1T(/M) and PD1U(/M) adapter plates (sold separately below) provide alternative mounting hole patterns for the top plate of the stage. The load can also be aligned using the array of Ø2 mm, 1.5 mm deep dowel pin holes; see the drawings below for details. Thorlabs also offers replacement dowel pins in packs of 20 below. Ensure that the maximum insertion depth of these holes is not exceeded or else the stage may be damaged. For more information, please refer to the Specs tab or the support documents accessible through the red Support Docs icons () below.

Stage Mounting Options
Counterbores for mounting each stage are accessible when the moving plate is translated to the ends of the travel range. There are two mounting options: two 2-56 (M2 x 0.4) screws on the corners with 0.35 N·m recommended torque or
8-32 (M4 x 0.7) screws along opposing edges of the base with 0.55 N·m recommended torque. We offer the TD75 torque driver for tightening to a specific torque value.

The stages should be mounted on an even surface with a recommended flatness of ≤5 μm. If the stage is mounted on a surface with >5 µm flatness (as with most breadboards and optical tables), the mounting torque may need to be decreased in order for the velocity variation and pitch/yaw of the stage to meet specifications. If needed, the PD1B(/M), PD1B2(/M), and PD1B3(/M) mounting adapters provide a mounting surface with precise flatness to avoid warping the stage when mounting it to a table surface.

Two linear stages can be stacked on top of each other for an XY configuration for applications that require additional movement; an example is shown in the image above.

The PD1Z(/M) right-angle bracket adapter allows one single-axis stage to be mounted vertically on top of another stage for an XZ or XYZ configuration. Alternatively, the bracket and single-axis stage can be used with a PD1B(/M), PD1B2(/M) or PD3B(/M) adapter for a Z-configuration that can be directly mounted to an optical table or breadboard. Note that when the stage is mounted vertically, the load capacity is greatly reduced.

When the XPCM1(/M) mount is used in combination with a PD1(/M) stage and PD1FM Ø1" Optic Mount, the PD1(/M) stage can be used to provide z- or x-translation of an optic vertically centered within a 30 mm cage system.

Compatibility with Other ORIC Stages
These stages can be combined with an ORIC rotation stage for applications that require XY translation and rotation, an example of which is shown to the above and to the right. An XZ or XYZ configuration can be created by mounting an ORIC 20 mm linear stage onto the top platform of a PDXZ1(/M) piezo inertia stage with 4.5 mm of vertical motion. ORIC 20 mm linear stages can also be mounted on our ORIC 50 mm linear stage where greater travel range is necessary.

Required Controller
One of our piezo inertia controllers is required to operate these stages. Note that the piezo inertia drives cannot be driven using a standard piezo controller. Please see below on more information on which controllers are compatible with each stage.

Click to Enlarge
Simplified Illustration Showing the Operation of the Piezo Inertia Drive

The "stick-slip" cycle consists of a slow piezo expansion and a fast piezo contraction.

Piezoelectric Inertia "Stick-Slip" Motor

The piezo inertia motor consists of three main parts: a flexure-coupled piezo actuator, a friction element, and a slider (the moving platform). During the "stick" part of a cycle, the piezo slowly expands under the ramp voltage, pushing the friction element and the slider forward in unison. During the "slip" part, the drive voltage drops rapidly and the piezo element returns to its starting length, with the friction element "slipping" backward. The slider does not move due to its inertia and the low coefficient of kinetic friction between the friction element and the bottom surface of the slider. The graph to the right shows the piezo drive voltage during one "stick-slip" cycle.

Repeating this cycle produces continuous forward travel of the slider. For travel in the reverse direction, the opposite drive voltage pattern is required, resulting in rapid piezo expansion and slower piezo contraction, or "slip-stick". During operation, the stage makes a high pitch noise and may generate some heat. This is normal behavior in the performance of the device and does not indicate a fault condition.

Due to a number of factors that include the application conditions, piezo hysteresis, component variance, and the axial load, the achieved step size will vary and is not repeatable. To help overcome this variance, an external feedback system will be necessary.

Specifications
Item #	PD1(/M)^a	PD1V(/M)^a	PD1D(/M)^a
Stage Type	Single-Axis Stage with Open-Loop Piezos	Vacuum-Compatible Single-Axis Stage with Open-Loop Piezos	Dual-Axis Stage with Open-Loop Piezos
Travel	20.0 mm		20.0 mm x 20.0 mm
Step Size	Typical: 1 µm^b Maximum: <3 µm^c
Step Size Adjustability	≤30%^c
Maximum Step Frequency	2 kHz^d
Speed (Continuous Stepping)	3 mm/s Typical Max^e,f
Average Velocity Variation Over Travel Range	±10%^e,g
Horizontal Load Capacity	3 kg (6.61 lbs)
Vertical Load Capacity^h	100 g (3.5 oz)		100 g (3.5 oz)ⁱ
Clamping / Holding Force	3 N
Pitch / Yaw Over Travel Range	200 µrad
XY Stacked Orthogonality	<5 mrad		≤2 mrad
Motor Type	Piezoelectric Inertia Drive
Lifetime	>10 Billion Steps^j	>10 Billion Steps^j,k	>10 Billion Steps^i,j,l
Vacuum Compatibility	N/A	10^-6 Torr	N/A
Piezo Specifications
Max Operating Voltage	125 V
Capacitance	170 nF
Physical Specifications
Operating Temperature	10 to 40 °C
Connector Type	SMC Female	Flying Leads Attached to Stage; Additional Bare Lead-to-SMC Female Cable Included	SMC Female
Cable Length	1 m (3.3 ft)^m	0.75 m (2.48 ft) Flying Lead for Vacuum; 1.0 m (3.3 ft)^r Cored Cable for Wiring Outside Chamber	1 m (3.3 ft)^m
Top Plate Mounting Options	Four 2-56 (M2) Threaded Holes, 3.5 mm Deep Six 8-32 (M4) Threaded Holes, 3.2 mm Deep Six Ø2 mm Dowel Pin Holes, 1.5 mm Deep PD1T(/M) and PD1U(/M) Adapters		Four 2-56 (M2) Threaded Holes, 3 mm Deep Two #2 (M2) Counterbores Four 8-32 (M4) Threaded Holes, 3.2 mm Deep Two #8 (M4) Counterbores Four Ø2 mm Dowel Pin Holes, 1.5 mm Deep PD1T(/M) and PD1U(/M) Adapters
Dimensions	32.5 mm x 32.0 mm x 11.5 mm (1.28" x 1.26" x 0.45")		32.5 mm x 32.5 mm x 20.0 mm (1.28" x 1.28" x 0.79")
Weight (Including Cable)	76 g (2.68 oz)	80 g (2.82 oz)	137 g (4.83 oz)
Required Controller (Sold Separately Below)	KIM001, KIM101^o, PDXC^p,or PDXC2^p,q
Extension Cable(s)	PAA101 Cable(s) and T5026 Adapter(s)^m	-	PAA101 Cable(s) and T5026 Adapter(s)^m

Specifications are measured using the KIM101 Piezo Inertia Motor Controller and with the stage mounted on a surface with flatness ≤5 µm.
This value can vary by up to 20% due to component variance, change of direction, and application conditions.
This is adjusted by changing the piezo drive voltage and frequency. See the KIM001 or KIM101 controller manuals for more details.
2 kHz is the maximum output from the KIM101 and KIM001 controllers.
Specified at 2 kHz Step Frequency
The forward and backward speeds may differ by up to 50% due to the open-loop design, component variances, and application conditions. Operating the stage with the wrong software settings will further increase the variance. Be sure to set the stage type to "PD(R)" in the Kinesis software if using a KIMx01 controller. For applications that require the speed in both directions to be balanced, we recommend using the PDXC or PDXC2 controller to adjust the forward and backward drive voltage amplitudes individually in order to mitigate the speed difference.
Variation in Speed in a Single Travel Direction
This is equivalent to the push/pull force along the axial/travel direction, which is 1 N.
Mounting the PD1D(/M) monolithic stage vertically is not recommended because the rails for one axis will experience a lateral force that may influence the angular error and even reduce the lifespan of the rail.
When mounted vertically, long term usage (>3 billion steps) may cause creep of the rails, leading to decreased travel range. To avoid this, return the stage to a horizontal position and run it back and forth over the full range several times after approximately 1 billion steps in a vertical orientation.
This lifetime is valid in a normal atmospheric environment. When using the stage in a vacuum, heat can only dissipate through the stage body itself, and abrasion will also be heavier than in an atmospheric environment. Because of these factors, the lifetime of the stage will be reduced.
Driven by the KIM101 Controller Under 2 kHz/85 V
The drive cable(s) may be extended up to a maximum of 2.5 m total using PAA101 cables and T5026 adapter. Longer cable lengths should not be used due to the capacitance of the cables.
The total length of the included cables is 1.75 m. Please note that, due to the capacitance of the cables, the total length of the control cables should not exceed 2.5 m.
The KIM101 controller version must be 2019 or newer (per the S/N label) with a firmware revision of 010004 or higher (indicated when the controller is powered on. Earlier versions of the KIM101 controller or those with older firmware will not function properly and may cause failure of the stage and/or the controller.
Since the PDXC and PDXC2 can operate at a higher frequency, they are capable of driving the PD1(/M), PD1V(/M), and PD1D(/M) stages at a higher speed and smaller step size compared to the KIM series controllers. However, due to the lower output voltage, the driving force will be lower.
The PDXC2AD D-sub to SMC adapter cable (available below) is required to drive an SMC terminated stage with the PDXC2 controller.

Specifications
Item #	PDX1(/M)^a	PDX1A(/M)^a,b	PDX1AV(/M)^a,b
Stage Type	Single-Axis Stage with Closed-Loop Piezos	Single-Axis Stage with Closed-Loop Piezos
Travel	20.0 mm
Optical Encoder Resolution	10 nm	12.5 nm
Bidirectional Repeatability	±0.75 µm
Absolute Accuracy	±3 µm	±2.5 µm
Minimum Incremental Motion	50 nm^c	300 nm^c
Step Size Adjustability	Range Using PDXC Controller Only: 0.01 to 10.00 mm^d Range Using PDXC or PDXC2 with PC Control: 0.00001 to 10.00 mm^d
Settling Time (Typical)	300 ms	400 ms
Maximum Step Frequency	20 kHz
Speed (Continuous Stepping)	2 to 20 mm/s Typical^c	10 mm/s Typical Max^c
Average Velocity Variation Over Travel Range	±2%^c
Horizontal Load Capacity	3 kg (6.61 lbs)
Vertical Load Capacity^e	100 g (3.5 oz)
Clamping / Holding Force	3 N	4 N
Pitch / Yaw Over Travel Range	200 µrad
XY Stacked Orthogonality	<5 mrad
Motor Type	Piezoelectric Inertia Drive
Lifetime	≥25 km^f	≥25 km^g	≥25 km^g,h
Vacuum Compatibility	N/A	N/A	10^-6 Torr
Piezo Specifications
Max Operating Voltage	60 V
Capacitance	65 nF	170 nF
Physical Specifications
Operating Temperature	10 to 40 °C
Connector Type	D-SUB 15-Pin Female		Flying Leads; Additional Bare Lead to D-SUB 15-Pin Female Included
Cable Length	1.5 m (4.9 ft)ⁱ		1.0 m (3.3 ft) Vacuum-Compatible Flying Encoder Lead 1.0 m (3.3 ft) Vacuum-Compatible Flying Lead 1.0 m (3.3 ft) Cable for Wiring Outside Chamber^j
Top Plate Mounting Options	Four 2-56 (M2) Threaded Holes, 3.5 mm Deep Six 8-32 (M4) Threaded Holes, 3.2 mm Deep Six Ø2 mm Dowel Pin Holes, 1.5 mm Deep PD1T(/M) and PD1U(/M) Adapters
Dimensions	41.6 mm x 32.5 mm x 15.0 mm (1.64" x 1.28" x 0.59")	36.7 mm x 32.5 mm x 11.5 mm (1.44" x 1.28" x 0.45")
Weight (Including Cable)	210 g (7.41 oz)	110 g (3.88 oz)	100 g (3.53 oz)
Required Controller (Sold Separately Below)	PDXC or PDXC2
Extension Cable(s)	PDXCE Cable (Optional, Not Included): 3 m (9.8 ft)ⁱ		PDXCE Cable (Optional, Not Included): 3 m (9.8 ft)^j

Specifications are measured using the PDXC and PDXC2 Inertia Piezo Controller and with the stage mounted on a surface with flatness ≤5 µm.
The stage should be stored at room temperature with relative humidity <40%.
Specified at 20 kHz driving frequency and in closed-loop mode.
This parameter is set by the controller and is not an intrinsic performance specification of the stage.
This is equivalent to the push/pull force along the axial/travel direction, which is 1 N.
With the stage mounted horizontally on a mounting plate with a 3 kg load centered on the carriage plate.
When mounted vertically, long term usage (>1 km distance) may cause creep of the rails, leading to decreased travel range. To avoid this, return the stage to a horizontal position and run it back and forth over the full range several times after approximately 0.5 km in a vertical orientation.
This lifetime is valid in a normal atmospheric environment. When using the stage in a vacuum, heat can only dissipate through the stage body itself, and abrasion will also be heavier than in an atmopspheric environment. Because of these factors, the lifetime of the stage will be reduced.
When using a PDXCE extension cable, with a length of 3000.0 mm (118.11"), the total cable length is 4.5 m (177.17"). Due to the capacitance of the cables, do not use cables longer than 4.5 m in total.
When using a PDXCE extenstion cable, with a length of 3000.0 mm (118.11"), the total cable length is 5.0 m (196.85"). Due to the capacitance of the cables, do not use cables longer than 5.0 m in total.

PD1(/M) & PD1D(/M)
Stages

SMC Female

0 to 125 V

PD1V(/M) Stage

Flying Leads

0 to 125 V
PTFE Jacket, 30 AWG

Additional Cable with
Female SMC Connector*

0 to 125 V
*The PD1V(/M) includes an additional bare lead-to-SMC cable.

PDX1(/M) Stage

Female 15-Pin D-Sub

PDX1A(/M) Stage

Female 15-Pin D-Sub

Pin(s)	Voltage Range	Name	Description
1	-7.5 to +12.5 V	Encoder_B_N	Encoder B-
2	-7.5 to +12.5 V	Encoder_B_P	Encoder B+
3	0 V	GND	Digital Ground
4	-7.5 to +12.5 V	Encoder_A_N	Encoder A-
5	-7.5 to +12.5 V	Encoder_A_P	Encoder A+
6	-	-	Reserved
7	-	-	Reserved
8	+5 V	+5 V	5 V Power
9	-7.5 to +12.5 V	Encoder_Z_N	Encoder Z-
10	-7.5 to +12.5 V	Encoder_Z_P	Encoder Z+
11	-10 to +50 V	SigOut2	Piezo Output 2
12	0 V	PGND	Power Ground
13	-10 to +50 V	SigOut1	Piezo Output 1
14	5 V TTL	EEPROM	1-Wire EEPROM
15	-	-	Reserved

Pin(s)	Voltage Range	Name	Description
1	-7.5 to +12.5 V	Encoder_B_N	Encoder B-
2	-7.5 to +12.5 V	Encoder_B_P	Encoder B+
3	0 V	GND	Digital Ground
4	-7.5 to +12.5 V	Encoder_A_N	Encoder A-
5	-7.5 to +12.5 V	Encoder_A_P	Encoder A+
6	-	-	Reserved
7	-	-	Reserved
8	+5 V	+5 V	5 V Power
9	-7.5 to +12.5 V	Encoder_Z_N	Encoder Z-
10	-7.5 to +12.5 V	Encoder_Z_P	Encoder Z+
11	-10 to +50 V	SigOut2	Piezo Output 2
12	0 V	PGND	Power Ground
13	-10 to +50 V	SigOut1	Piezo Output 1
14	5 V TTL	EEPROM	1-Wire EEPROM
15	-	-	Reserved

PDX1AV(/M) Stage

The PD1XAV(/M) stage is supplied with vacuum compatible flying leads for connecting the actuator and the reader to the vacuum chamber bulkhead and an additional cable for connecting to the controller outside the vacuum system. To connect the stage to the controller, first connect the two flying leads from the PDX1AV(/M) stage to the included cable with flying leads on one end and a 15-pin D-SUB female connector on the other. Connect the encoder wires from the stage to the included cable, matching both color and gauge. Then, connect the D-SUB connector to the male terminal on the front panel of the PDXC or PDXC2 controller. For pin-out details, please see the pin diagram and table below.

Customers wishing to wire the stage to other systems should consult the colored encoder wire diagram below to ensure proper electrical connection. For additional details on the electrical controller connections, please refer to the PDXC or PDXC2 controller manuals.

PDX1AV(/M) Encoder Cable Wire Diagram

36 AWG

Flying Leads

0 to 60 V
PTFE Jacket, 30 AWG

Female 15-Pin D-Sub^a

Pin(s)	Color	Name	Description
1	Brown	A_OUT	Encoder A
2	Orange	B_OUT	Encoder B
3	Purple	GND	Power Ground
4	Green	Z_OUT	Encoder Z
5	Black	GND	Power Ground
6	White	MA	Controller Clock
7	Blue	SLI	Device Data In
8	Grey	SLO	Device Data Out
9	Red	+5 V	5 V Power
10	Yellow	NC	No Connection

Pin(s)	Voltage Range	Name	Description
1	-7.5 to +12.5 V	Encoder_B_N	Encoder B-
2	-7.5 to +12.5 V	Encoder_B_P	Encoder B+
3	0 V	GND	Digital Ground
4	-7.5 to +12.5 V	Encoder_A_N	Encoder A-
5	-7.5 to +12.5 V	Encoder_A_P	Encoder A+
6	-	-	Reserved
7	-	-	Reserved
8	+5 V	+5 V	5 V Power
9	-7.5 to +12.5 V	Encoder_Z_N	Encoder Z-
10	-7.5 to +12.5 V	Encoder_Z_P	Encoder Z+
11	-	-	Reserved
12	0 V	PGND	Power Ground (White Wire)
13	-10 to +50 V	SigOut1	Piezo Output (Red Wire)
14	5 V TTL	EEPROM	1-Wire EEPROM
15	-	-	Reserved

Please note that the flying encoder leads attached to the PDX1AV(/M) and the leads on the additional cable are matched by color, one-to-one.

Note: This software is only compatible with the PDXC controller; it cannot be used with the PDXC2, KIM001, and KIM101 controllers.

Software

PDXC Version 2.1.0

The PDXC Software Package, which includes a GUI, drivers, and LabVIEW™/C++/Python SDK for third-party development.

Thorlabs offers the PDXC software package to interface with the PDXC Piezo Stage Controller. This controller is designed to drive the following piezo inertia stages:

PDXZ1(/M) 4.5 mm Vertical Stage with Optical Encoder
PD2(/M) 5 mm Linear Stage
PDX2(/M) 5 mm Linear Stage with Optical Encoder
PD1(/M) 20 mm Linear Stage
PD1V(/M) Vacuum-Compatible 20 mm Linear Stage
PD1D(/M) 20 mm Monolithic XY Stage
PDX1(/M) 20 mm Linear Stage with Optical Encoder
PDX1A(/M) 20 mm Low-Profile, Linear Stage with Optical Encoder
PDX1AV(/M) Vacuum-Compatible 20 mm Low-Profile, Linear Stage with Optical Encoder
PD3(/M) 50 mm Linear Stage
PDR1C(/M) Rotation Stage
PDXR1(/M) Rotation Stage with Optical Encoder

The software package allows two methods of usage: graphical user interface (GUI) utilities for direct interaction with and control of the controllers 'out of the box', and a set of programming interfaces for third-party development of custom-integrated positioning and alignment solutions to be easily programmed in the development language of choice (LabVIEW™/C++/Python SDK).

Note: This software is compatible with the PDXC2, KIM001, and KIM101 controllers; it cannot be used to operate the PDXC controller.

Software

Kinesis Version 1.14.50

The Kinesis Software Package, which includes a GUI for control of Thorlabs' Kinesis system controllers.

Also Available:

Communications Protocol

Kinesis GUI Screen

Thorlabs offers the Kinesis^® software package to drive our wide range of motion controllers. The software can be used to control devices in the Kinesis family, which covers a wide variety of motion controllers ranging from small, low-powered, single-channel drivers (such as the K-Cubes™) to high-power, multi-channel benchtop units and modular 19" rack nanopositioning systems (the MMR60x Rack System).

The Kinesis Software features .NET controls which can be used by 3rd party developers working in the latest C#, Visual Basic, LabVIEW™, or any .NET compatible languages to create custom applications. Low-level DLL libraries are included for applications not expected to use the .NET framework and APIs are included with each install. A Central Sequence Manager supports integration and synchronization of all Thorlabs motion control hardware.

By providing this common software platform, Thorlabs has ensured that users can mix and match any of our motion control devices in a single application, while only having to learn a single set of software tools. In this way, it is perfectly feasible to combine any of the controllers from single-axis to multi-axis systems and control all from a single, PC-based unified software interface.

The software package allows two methods of usage: graphical user interface (GUI) utilities for direct interaction with and control of the controllers 'out of the box', and a set of programming interfaces that allow custom-integrated positioning and alignment solutions to be easily programmed in the development language of choice.

Legacy Software
Select products are still capable of running the legacy APT™ software package. Information on software compatibility can be found in the product documentation ( Docs Icon ), and additional details about the APT software can be found here.

Thorlabs' Kinesis^® software features new .NET controls which can be used by third-party developers working in the latest C#, Visual Basic, LabVIEW™, or any .NET compatible languages to create custom applications.

C#
This programming language is designed to allow multiple programming paradigms, or languages, to be used, thus allowing for complex problems to be solved in an easy or efficient manner. It encompasses typing, imperative, declarative, functional, generic, object-oriented, and component-oriented programming. By providing functionality with this common software platform, Thorlabs has ensured that users can easily mix and match any of the Kinesis controllers in a single application, while only having to learn a single set of software tools. In this way, it is perfectly feasible to combine any of the controllers from the low-powered, single-axis to the high-powered, multi-axis systems and control all from a single, PC-based unified software interface.

The Kinesis System Software allows two methods of usage: graphical user interface (GUI) utilities for direct interaction and control of the controllers 'out of the box', and a set of programming interfaces that allow custom-integrated positioning and alignment solutions to be easily programmed in the development language of choice.

For a collection of example projects that can be compiled and run to demonstrate the different ways in which developers can build on the Kinesis motion control libraries, click on the links below. Please note that a separate integrated development environment (IDE) (e.g., Microsoft Visual Studio) will be required to execute the Quick Start examples. The C# example projects can be executed using the included .NET controls in the Kinesis software package (see the Kinesis Software tab for details).

Click Here for the Kinesis with C# Quick Start Guide
Click Here for C# Example Projects
Click Here for Quick Start Device Control Examples

LabVIEW
LabVIEW can be used to communicate with any Kinesis- or APT-based controller via .NET controls. In LabVIEW, you build a user interface, known as a front panel, with a set of tools and objects and then add code using graphical representations of functions to control the front panel objects. The LabVIEW tutorial, provided below, provides some information on using the .NET controls to create control GUIs for Kinesis- and APT-driven devices within LabVIEW. It includes an overview with basic information about using controllers in LabVIEW and explains the setup procedure that needs to be completed before using a LabVIEW GUI to operate a device.

Click Here to View the LabVIEW Guide
Click Here to View the Kinesis with LabVIEW Overview Page

Achieving the Specified Performance

In this application note, we will discuss how to achieve the specified velocity and step size for the open-loop PD1(/M), PD1D(/M), and PDR1(/M) ORIC^® Stages when driving them with KIM001 or KIM101 K-Cube™ Controllers; examples using the Kinesis^® software and the K-Cube's front panel controls are discussed below. There are limitations when using an open-loop system, and we have created this application note to help minimize velocity and step size variation. We recommend using this application note upon initial setup, and/or if you are having issues with velocity and step size variation. For further details on how to change settings, please refer to the manuals of the individual stage and controller.

Click to Enlarge
Figure 2: These are the recommended channel settings for the PD(R) stage type. They can be changed in Device Settings -> Current Device Settings-> Channel 1.

Click to Enlarge
Figure 1: When controlling an ORIC Stage, the stage type needs to be set to PD(R). This can be found in the Kinesis Software Device Settings -> Startup.

Click to Enlarge
Figure 4: Depicted in the circle is the jog mode, which should be set to continuous. This can be changed in Device Settings -> Current -> Channel 1.

Figure 3: Circled in black are the jog buttons which can be found in the device GUI.

Kinesis^© Software Control with a K-Cube Controller

The Kinesis software defaults the stage type to PIA, which is not applicable to ORIC stages; to change this, we need to change the startup settings. The startup settings can be found by first accessing the device settings in the device GUI panel and then clicking the Startup tab. Under the Configuration tab, change the stage type to PD(R), check the "Persist Settings to the Device" box on the bottom right, and click the "Save" button in the lower left corner. These selections are shown circled in Figure 1. By using these settings, the Kinesis software will use the PD(R) stage type. The other device and channel settings can also be changed in the startup settings.

With the PD(R) stage type, we recommend certain channel settings to achieve the specified speed, speed variation, and force. These settings can be changed in the "Channel 1" tab of the device settings and are depicted in Figure 2. We will be focusing on the settings in the “Drive” box, circled in black, and the "Jog" box, circled in blue.

For the "Drive" box, we recommend setting the "Maximum Voltage" to 85 V, the "Rate" at 2000 steps/s, and "Acceleration" to 10000 Steps/s². For the settings in the "Jog" box, we recommend setting the "Forward Size" to 250 Steps, the "Reverse Size" to 250 Steps, the "Mode" to "Continuous", the "Step Rate" to 2000 Steps/s, and the "Step Acceleration" to 10000 Steps/s². To achieve the specified results, it is important to make sure the stage is mounted properly to an even surface, to our recommended mounting plate, or to a compatible adapter plate.

A continuous jog at a step rate higher than 1000 steps/s can only be achieved by using the jog buttons in the device GUI, shown circled in Figure 3. Continuous jog movement is limited to within 1000 step/s when using the joystick on the KIM101 K-Cube Controller or wheel on the KIM001 K-Cube Controller. Single movement or movement by counts is not limited to 1000 step/s when using the joystick or wheel.

Please note that if you change the jog mode in Kinesis to "Continuous" or "Single" this will only influence the jog buttons in the Kinesis GUI, shown circled in Figure 3. This will not change the joystick mode on the KIM001 or KIM101 controller front panel. The jog mode can be found in Kinesis under Device settings -> Channel 1 -> "Jog" box -> "Mode", also shown in Figure 4. More information on this can be found in the Front Panel Control section, located below.

Click to Enlarge
Figure 6: Kinesis software showing the "Device" tab under Device Settings in the Device GUI. The "Maximum Step Rate" setting is circled in blue. To use the joystick with continuous jogging mode this setting must be less than 1000 steps/s. The Kinesis joystick modes can be selected via the dropdown menu circled in black.

Figure 5: Drawing of the front panel of the KIM101 K-Cube Controller showing option 5, Joystick Mode.

Click to Enlarge
Figure 8: Kinesis software showing where the step size can be changed using the "Forward Size" and "Reverse Size" settings. The "Mode" setting, also shown, only affects the controls of the jog buttons in the GUI and does not affect the joystick mode.

Click to Enlarge
Figure 7: The drive rate can be changed in the Kinesis software under Device Settings -> Current -> Channel 1. This is equivalent to Front Panel Control option 3, "Set Velocity".

KIMx01 Front Panel Control and Related Settings in Kinesis

There are 10 options on the front panel control menu. These can be accessed using the two buttons and joystick on the KIM101 K-Cube Controller or the button and wheel on the KIM001 K-Cube Controller.

Option 5, Joystick Mode, shown in Figure 5, has 3 modes: "Jog to Count", "Jogging in Steps", and "Velocity Control". The Joystick mode in the Kinesis software is related to option 5, Joystick Mode, on the front panel. The three options for the Joystick Mode in the Kinesis software are "Step Rate", "Jog", and "Goto Position". This setting is circled in black in Figure 6.

"Jog to Count" mode will move the stage to the target count, which is defaulted at 0, under the velocity that is set by option 3, "Set Velocity" on the front panel. The setting for option 3 is the velocity at which the stage will move for option 5’s “Jog to Count” mode and for option 1, "Goto Pos Count". There is an equivalent setting in Kinesis which can be found in Device Settings -> Channel 1 -> "Drive" box -> "Rate". This is shown in Figure 7.

In "Jogging in Steps" mode, option 3, "Set Velocity" does not change the stage's velocity. The velocity in this mode must be changed in the Kinesis software. This can be changed in Device settings -> Channel 1 -> "Jog" box -> "Step Rate". Instead of changing the step rate to increase the stage speed, the step size can be changed to increase the stage speed. The step size can be changed on the front panel of a KIM001 or KIM101 device through option 4, "Jog Step Size". This can also be achieved in Kinesis through Device settings -> "Channel 1" -> "Jog" box-> "Forward Size" and "Reverse Size", shown in Figure 8.

In option 5 "Velocity Control" mode, the joystick can be used to achieve continuous jogging, but only if the velocity is less than 1000 step/s. This velocity cannot be changed by option 3 on the front panel. The velocity can only be changed in the Kinesis software under the Device settings -> Device -> "Maximum Step Rate", shown in Figure 6. A value of 10000 may appear initially, but this value is not accepted by the software and must be revised to a number between 1 and 1000.

In Kinesis, the joystick mode "Step Rate", is related to the "Velocity Control" mode on the front panel and can use the setting of "Maximum Step Rate". The "Direction Sense" can be used to switch the travel direction when using the joystick or wheel.

Posted Comments:

Ioannes Zhang (posted 2023-08-15 18:28:11.737)

Hi, I`m using PD1/M with KIM001 suffering from huge step size difference across opposite directions, too. The motor has no addition load and is fixed on a horizonal PD1B2/M. The problem can be reproduced both via direct control of wheel on KIM001 or via indirect control via Kinesis. I have checked user guides and found that my firmware version is FW1.00.02 (shown in Kinesis), which doesn`t match 010004 as required (in P.13 of PD1 user guide). However, after executing the update utility, the firmware version remain unchanged. I`m wondering whether the failure of controlling comes from outdated firmware. If true, how can I upgrade it. Thank you.

cdolbashian (posted 2023-08-17 08:16:52.0)

Thank you for contacting Thorlabs. Due to a number of factors that include the application conditions, piezo hysteresis, component variance, and the axial load, the achieved step size will vary by over 20% and is not repeatable. Before driving this stage, make sure the stage mode is switched to PD(R). We have provided some settings information under "Open-Loop Stage Setup" tab to help minimize velocity and step size variation. The firmware version 010004 refers to the KIM101, so KIM001 does not have such requirements. We have reached out to you directly to troubleshoot this issue.

Matt H (posted 2023-03-28 14:48:21.683)

Hi, I am using a PD1D/M and a PD1M in a XYZ config. I have set up using the settings from the Open Loop Tab above. However Like Others I am experiencing big changes in velocity from forwards and Backwards. Whilst the velocity is not an issue the difference in step sizes is huge. In all 3 axes 5000 steps in Forwards direction is almost double 5000 steps in Backwards direction. This means its almost impossible to write software for future automation, as the home position will keep changing every time you move the stage

cdolbashian (posted 2023-04-04 11:05:23.0)

Thank you for contacting Thorlabs. Due to open-loop design, component variance and application conditions, the forward and reverse speeds may differ by up to 50%. We recommend to tune speed difference with PDXC’s amplitude adjustment function. As mentioned in "overview" -> "Piezoelectric Inertia 'Stick-Slip' Motor", since the operation of the piezo inertia drive differently in forward and reverse directions, the step size will vary. To help overcome this variance, an external feedback system will be necessary.

Jason Hancock (posted 2023-02-07 07:31:44.88)

Hi, I am wondering if you can offer both vacuum compatibility (PDV1) and optical encoder (PDX1) together in the same stage? What exactly is vacuum incompatible about the optical encoder?

cdolbashian (posted 2023-02-17 01:59:17.0)

Thank you for contacting Thorlabs. A vacuum compatible PDX1/M is possible. We would first need to do some redesigning and verification of the completed product though. We will reach out to you directly to gather more detailed information about your application, so that we can evaluate the feasibility of the customization.

user (posted 2022-07-27 18:56:40.42)

请问这款位移台的底层驱动资料，我们需要用嵌入式实现驱动程序，包括驱动的协议以及配置和控制的编码要求。

cdolbashian (posted 2022-08-05 04:43:09.0)

Thank you for contacting Thorlabs. The communication protocol is in Chapter 6 of the PDXC manual, and can be downloaded by clicking the red "docs" icon in front of the PDXC part number. (https://www.thorlabs.com/_sd.cfm?fileName=CTN015391-D02.pdf&partNumber=PDXC)

edoardo sotgiu (posted 2022-03-17 13:50:22.75)

Hi, I would like to know if in the near future you could try to provide a service to upgrade the PD1/M to a version similar to the PD1V/M. Otherwise, as complained by several clients, that stage is really unusable. Thank you Regards

Qiyao Liu (posted 2021-07-21 12:19:56.323)

Dear Sir or mdm, I am looking for a high accuracy translation stage better with nm scale resolution and no backlash. I will use it for scanning, could you please let me know wether this module can realize such function?

YLohia (posted 2021-07-26 11:55:10.0)

Thank you for contacting Thorlabs. The PDX1 stage is ideal for applications that require nanometer resolution without backlash. The built-in optical encoder provides high accuracy positioning resolution up to 10 nm when being controlled by the PDXC controller.

user (posted 2021-04-12 15:28:18.773)

Hello, I am experiencing similar issues as some people have already raised in the comments: 1. Speed isnt matching the same displacement forward and backwards. Is there a way to set up the steps to counterbalance this effect ? 2. When placed in a XZ configuration, the Z-module is slicing down. How can i solve this? 3. Out of the 2 PD1/M that i received, one has a loose movable plate and effectively not usable. Is there a bolt to tighten to solve this issue ? Thank you :)

YLohia (posted 2021-04-14 10:12:22.0)

Hello, thank you for contacting Thorlabs. The forward and backward velocities may differ by up to 50% due to the open-loop design, component variances, and application conditions. Operating the stage with the wrong software settings will further increase the variance; be sure to select stage type "PD(R)" in the Kinesis software. To ensure proper performance in the Z axis, please make sure that your load does not exceed 100 g. The loose movable plate is not normal and should not happen with normal use. We may need to take the stage back for inspection and repair. I have reached out to you directly for more troubleshooting.

edoardo sotgiu (posted 2021-03-30 10:33:42.137)

Dear Thorlabs, as experienced by many other users (user (posted 2021-03-10 11:35:33.88), sun fangyuan (posted 2021-03-03 13:28:41.307), Peng Zhu (posted 2020-12-17 13:15:07.46), ...) the speed differs a lot along the two directions (back and fore). In the datasheet is reported that the step size can suffer for a variability of around 20%, but the error here seems even larger (let's say around 50%): " Due to the open loop design, piezo hysteresis, component variance, and application conditions, the achieved step size of the system may vary by over 20% and is not normally repeatable." Being under warranty, I would like to send you back to verify the stages here are working properly or if they are affected by some weird condition. Anyway, do you think in the very close future such actuators will be provided with a close loop control? I mean, I would expect an update on the firmware and in case also on the electromechanical components (sensors) on the items we've already bought. Thank you Regards

nreusch (posted 2021-04-06 04:12:10.0)

Thank you for contacting Thorlabs, we will update some application note on the web about PD1 usage, and in the meanwhile, we will contact you for an inspection of the item. A closed loop version would help and it is something under our new product release plan.

user (posted 2021-03-10 11:35:33.88)

Currently using 3x PD1Z and a PDR1 with KIM101 controller. We are experiencing similar issues as mentioned by other users in that the moving speeds differ going forwards and backwards (and up and down). This is using the native Kinesis (issue also present when using APT) software. Also found that the "home" command in the provided Kinesis package does not function. Could you please reach out to resolve this issue?

YLohia (posted 2021-03-15 11:01:53.0)

Thank you for contacting Thorlabs. We have reached out to you directly to troubleshoot this further.

MICHAEL VALOIS (posted 2021-03-04 16:36:33.223)

I'm having trouble importing the STEP file for your PD1 stage. Could you send a Parasolid or ACIS file? Thanks, Mike Valois

YLohia (posted 2021-03-17 02:22:13.0)

Hello, thank you for contacting Thorlabs. We will reach out to you directly with a Parasolid file.

sun fangyuan (posted 2021-03-03 13:28:41.307)

Hi, when i use the KIM100 (using APT software) to control PD1/M, but the repeatability of the stage is worse. Do you know how to get a solution?

YLohia (posted 2021-03-09 12:50:43.0)

Hello, thank you for contacting Thorlabs. Is the repeatability worse when using APT as opposed to Kinesis? If so, by how much? Are you using the KIM101 controller? We have reached out to you to troubleshoot this further.

Peng Zhu (posted 2020-12-17 13:15:07.46)

We ordered PD1/M with KIM101 controller, We place the PD1/M horizontally, but found the moving speeds of forward and backward had a huge difference. Forward speed is approx 3~4 times than backward speed. Is this device are defect? Or how to fixed it?

YLohia (posted 2020-12-22 11:38:38.0)

Thank you for contacting Thorlabs. For this PD1 stages, the mechanics tolerance and assembly variation will cause 30%-50% difference in speed for both directions of travel under 2000 step/s. For a low speed and acceleration rate, the speed difference between two directions will be even larger. The behavior you are seeing may be related to the improper settings. We have reached out to you directly to troubleshoot this issue.

Yoonhyuk Rah (posted 2020-10-26 21:33:27.943)

The KIM101 controller says it can control the voltage from 85V to 125V. Does this mean that if I connect the KIM101 to the PD1 stage, the KIM101 piezo voltage will control the step size length and when I move the stage it will move in a step like motion? Also can the piezo voltage be set to smaller than 85V?

YLohia (posted 2020-11-03 09:48:06.0)

Thank you for contacting Thorlabs. Yes, you are correct. The drive voltage will control the step size length and the step size can be increased by up to about 30% by changing the piezo drive voltage. Continuous motion is achieved through "continuous stepping". Due to the open loop design, piezo hysteresis, component variance, and application conditions, the achieved step size of the system may vary by over 20% and is generally not repeatable. The output voltage range of KIM101 is 85 to 125 V -- unfortunately, it cannot be set to smaller than 85 V.

Pavlo Zolotavin (posted 2020-10-13 18:14:38.057)

I am using three PD1/M modules for XYZ positioning. Every time I move in the XY direction the Z-direction piezo is slipping downward. I don't exceed the 100g weight limit, but it still does not stay fixed (it slides down even without anything attached to it). As of right now the whole system is unusable as an XYZ positioner. Any suggestions on how to avoid this? Thanks

YLohia (posted 2020-10-15 09:21:58.0)

Hello, thank you for contacting Thorlabs. We are sorry to hear about the issues you are experiencing with this. We have reached out to you directly to troubleshoot this further.

Gregory Lafyatis (posted 2020-09-17 11:53:32.913)

ORIC® 20 mm Linear Stage with Piezoelectric Inertia Drive Have you tried using these at cryogenic temperatures (4K) ? I know the piezo effect is significantly reduced and probably cable needs replacing but if they work at all they'd be very useful.

YLohia (posted 2020-09-23 08:39:28.0)

Thank you for contacting Thorlabs. We have not tested this stage at cryogenic temperatures. The recommended temperature range is 10-40 °C due to the limitations of the piezo, as well as the electronics. In 4K cryogenic applications, the resultant shorter displacement could have a huge impact on force and speed performance.

Chun-Cheng Chu (posted 2019-11-25 07:39:41.433)

Hello, I want to know whether this stage is vacuum compatible or not. Thank you.

nbayconich (posted 2019-11-25 03:24:15.0)

Thank you for contacting Thorlabs. The PD1 is not designed for vacuum use. It also has anti-rust oil that is unsuitable for vacuum. I will reach out to you directly.

Shiyang Zhong (posted 2019-09-17 03:40:28.49)

Is PD1 stages compatible with 10^-6 mbar vacuum? If not, is there a vaccum compatible version? Thank you.

YLohia (posted 2019-09-19 08:44:06.0)

Hello, the PD1 is not designed for vacuum use. It also has anti-rust oil that is unsuitable for vacuum. We will reach out to you directly to discuss the possibility of offering a vacuum compatible option as a special.

Motorized Linear Translation Stages

Thorlabs' motorized linear translation stages are offered in a range of maximum travel distances, from a stage with 20 µm of piezo translation to our 600 mm direct drive stage. Many of these stages can be assembled in multi-axis configurations, providing XY or XYZ translation. For fiber coupling applications, please see our multi-axis stages, which offer finer adjustment than our standard motorized translation stages. In addition to motorized linear translation stages, we offer motorized rotation stages and goniometers. We also offer manual translation stages.

Piezo Stages

These stages incorporate piezoelectric elements in a variety of drive mechanisms. ORIC^® stages incorporate piezo inertia drives that use "stick-slip" friction properties to obtain extended travel ranges. Our Nanoflex™ translation stages use standard piezo chips along with manual actuators. Elliptec^® stages use resonant piezo motors to push and pull the moving platform through resonant elliptical motion. Our LPS710E z-axis stage features a mechanically amplified piezo design and includes a matched controller.

Piezoelectric Stages
Product Family	ORIC^® PDXZ1 Closed-Loop 4.5 mm Vertical Stage	ORIC^® PD2 Open-Loop 5 mm Stage	ORIC® PDX2 Closed-Loop 5 mm Stage
Click Photo to Enlarge
Travel	4.5 mm	5 mm
Speed	1 mm/s (Typ.)^a	10 mm/s (Typ. Max)^b	8 mm/s (Typ.)^c
Drive Type	Piezoelectric Inertia Drive
Possible Axis Configurations	Z	X, XY, XYZ
Mounting Surface Size	45.0 mm x 42.0 mm	13 mm x 13 mm
Additional Details

Specified at 20 kHz Driving Frequency and in Closed-Loop Mode
Specified using PDXC and PDXC2 Benchtop Controllers. For performance when controlled with a KIM001 or KIM101 K-Cube Controller, see the Specs tab of the PD2 or PD3 stage presentation.
Specified using PDXC and PDXC2 Benchtop Controllers.

Piezoelectric Stages
Product Family	ORIC^® PD1 Open-Loop 20 mm Stage	ORIC^® PD1D Open-Loop 20 mm Monolithic XY Stage	ORIC^® PDX1 Closed-Loop 20 mm Stage	ORIC^® PDX1A Closed-Loop 20 mm Stage Low-Profile	ORIC^® PD3 Open-Loop 50 mm Stage
Click Photo to Enlarge
Travel	20 mm				50 mm
Speed	3 mm/s (Typ. Max)^a		20 mm/s (Typ. Max)^c	10 mm/s (Typ.)^b	10 mm/s^d
Drive Type	Piezoelectric Inertia Drive
Possible Axis Configurations	X, XY, XYZ	XY, XYZ	X, XY, XYZ	X, XY, XYZ	X, XY, XYZ
Mounting Surface Size	30 mm x 30 mm				80 mm x 30 mm
Additional Details

Specified using KIM101 K-Cube Controller.
Specified at 20 kHz driving frequency and in closed-loop mode.
Specified using PDXC and PDXC2 Benchtop Controllers.
Specified using PDXC and PDXC2 Benchtop Controllers. For performance when controlled with a KIM001 or KIM101 K-Cube Controller, see the Specs tab of the PD2 or PD3 stage presentation.

Piezoelectric Stages
Product Family	Nanoflex™ 20 µm Stage with 5 mm Actuator	Nanoflex™ 25 µm Stage with 1.5 mm Actuator	Elliptec^® 28 mm Stage	Elliptec^® 60 mm Stage	LPS710E 1.1 mm Vertical Stage
Click Photo to Enlarge
Travel	20 µm + 5 mm Manual	25 µm + 1.5 mm Manual	28 mm	60.0 mm	1.1 mm
Maximum Velocity	-		180 mm/s	90 mm/s	-
Drive Type	Piezo with Manual Actuator		Resonant Piezoelectric Motor		Amplified Piezo
Possible Axis Configurations	X, XY, XYZ		X		Z
Mounting Surface Size	75 mm x 75 mm	30 mm x 30 mm	15 mm x 15 mm		21 mm x 21 mm
Additional Details

Stepper Motor Stages

These translation stages feature removable or integrated stepper motors and long travel ranges up to 300 mm. Many of these stages either have integrated multi-axis capability (PLSXY) or can be assembled into multi-axis configurations (PLSX, LNR Series, NRT Series, and LTS Series stages). The MLJ150 stage also offers high load capacity vertical translation.

Stepper Motor Stages
Product Family	PLSX with and without PLST(/M) Top Plate 1" Stage	PLSXY with and without PLST(/M) Top Plate 1" Stage	LNR Series 25 mm Stage	LNR Series 50 mm Stage
Click Photo to Enlarge
Travel	1"		25 mm	50 mm
Maximum Velocity	7.0 mm/s		2.0 mm/s	50 mm/s
Possible Axis Configurations	X, XY		X, XY, XYZ	X, XY, XYZ
Mounting Surface Size	3" x 3"		60 mm x 60 mm	100 mm x 100 mm
Additional Details

Stepper Motor Stages
Product Family	NRT Series 100 mm Stage	NRT Series 150 mm Stage	LTS Series 150 mm Stage	LTS Series 300 mm Stage	MLJ250 50 mm Vertical Stage
Click Photo to Enlarge
Travel	100 mm	150 mm	150 mm	300 mm	50 mm
Maximum Velocity	30 mm/s		50 mm/s		3.0 mm/s
Possible Axis Configurations	X, XY, XYZ		X, XY, XYZ		Z
Mounting Surface Size	84 mm x 84 mm		100 mm x 90 mm		148 mm x 131 mm
Additional Details

DC Servo Motor Stages

Thorlabs offers linear translation stages with removable or integrated DC servo motors. These stages feature low profiles and many can be assembled in multi-axis configurations.

DC Servo Motor Stages
Product Family	MT Series 12 mm Stages	PT Series 25 mm Stages	MTS Series 25 mm Stage	MTS Series 50 mm Stage
Click Photo to Enlarge
Travel	12 mm	25 mm	25 mm	50 mm
Maximum Velocity	2.6 mm/s		2.4 mm/s
Possible Axis Configurations	X, XY, XYZ		X, XY, XYZ
Mounting Surface Size	61 mm x 61 mm	101.6 mm x 76.2 mm	43 mm x 43 mm
Additional Details

DC Servo Motor Stages
Product Family	M30 Series 30 mm Stage	M30 Series 30 mm Monolithic XY Stage	M150 Series 150 mm XY Stage	KVS30 30 mm Vertical Stage
Click Photo to Enlarge
Travel	30 mm		150 mm	30 mm
Maximum Velocity	2.4 mm/s		X-Axis: 170 mm/s Y-Axis: 230 mm/s	8.0 mm/s
Possible Axis Configurations	X, Z	XY, XZ	XY	Z
Mounting Surface Size	115 mm x 115 mm		272.4 mm x 272.4 mm	116.2 mm x 116.2 mm
Additional Details

Direct Drive Stages

These low-profile stages feature integrated brushless DC servo motors for high speed translation with zero backlash. When no power is applied, the platforms of these stages have very little inertia and are virtually free running. Hence these stages may not be suitable for applications where the stage's platform needs to remain in a set position when the power is off. We do not recommend mounting these stages vertically.

Direct Drive Stages
Product Family	DDS Series 50 mm Stage	DDS Series 100 mm Stage	DDS Series 220 mm Stage	DDS Series 300 mm Stage	DDS Series 600 mm Stage
Click Photo to Enlarge
Travel	50 mm	100 mm	220 mm	300 mm	600 mm
Maximum Velocity	500 mm/s		300 mm/s	400 mm/s	400 mm/s
Possible Axis Configurations	X, XY		X, XY	X	X
Mounting Surface Size	60 mm x 52 mm		88 mm x 88 mm	120 mm x 120 mm
Additional Details

Item #	PDXZ1(/M)	PD2(/M)	PDX2(/M)
Positioning Performance	12.5 nm Optical Encoder Resolution	N/A	12.5 nm Optical Encoder Resolution
Mounting Holes	2-56 (M2), (8 Places) 4-40, (4 Places) M3, (4 Places) 8-32 (M4), (8 Places) 1/4"-20 (M6), (1 Place)	00-90 (M1.2), 6 Places
Load Capacity	Vertical: 2.2 lbs / 1 kg	Horizontal: 2.20 lbs / 1 kg Vertical: 0.11 lbs / 0.05 kg

Item #	PD1(/M) PD1V(/M) (Vacuum Compatible)	PD1D(/M)	PDX1(/M)	PDX1A(/M) PDX1AV(/M) (Vacuum Compatible)	PD3(/M)
Positioning Performance	N/A	N/A	10 nm Optical Encoder Resolution	12.5 nm Optical Encoder Resolution	N/A
Mounting Holes	2-56 (M2), 4 Places 8-32 (M4), 6 Places	2-56 (M2), 4 Places #2 (M2) Counterbores, 2 Places 8-32 (M4), 4 Places #8 (M4) Counterbores, 2 Places	2-56 (M2), 4 Places 8-32 (M4), 6 Places		8-32 (M4), 16 Places
Load Capacity	Horizontal: 6.61 lbs / 3 kg Vertical: 0.22 lbs / 0.1 kg				Horizontal: 6.61 lbs / 3 kg Vertical: 0.22 lbs / 0.1 kg^a

Item #	NF15AP25(/M)	NFL5DP20(/M), NFL5DP20S(/M)	ELL17(/M), ELL17K(/M) (Stage + Controller)	ELL20(/M), ELL20K(/M) (Stage + Controller)	LPS710E(/M) (Stage + Controller)
Positioning Performance	Piezo Resolution: 0.6 nm (Theoretical)		Positioning Accuracy: 50 µm, Repeatability: 20 µm		Bidirectional Repeatability: ±0.03%
Mounting Holes	4-40 (M2), 5 Places 8-32 (M4), 1 Place	6-32 (M3), 4 Places 8-32 (M4), 4 Places 1/4"-20 (M6), 4 Places	4-40 (M3), 4 Places 8-32 (M4), 1 Place		4-40 (M3), 4 Places
Load Capacity	Horizontal: 1.1 lbs / 0.5 kg Vertical: 0.55 lbs / 0.25 kg	Horizontal: 2.2 lbs / 1 kg Vertical: 1.1 lbs / 0.5 kg	0.44 lbs / 0.2 kg		0.66 lbs / 0.3 kg

Item #	PLSX	PLSXY	LNR25ZFS(/M)	LNR502(/M), LNR502E(/M)
Positioning Performance	Bidirectional Repeatability:5 µm		On-Axis Accuracy: 15 µm	Bidirectional Repeatability: 3.9 µm (Standard) 0.75 µm (w/ Optical Encoding)
Mounting Holes	4-40, 4 Places (with PLST(/M) Top Plate: 1/4"-20 (M6) 9 Places, 8-32 (M4) 12 Places)		1/4"-20 (M6), 7 Places	1/4"-20 (M6), 13 Places
Load Capacity	Horizontal: 33.1 lbs / 15.0 kg Vertical: 8.0 lbs / 3.6 kg	Horizontal: 31.8 lbs / 14.4 kg Vertical: 6.0 lbs / 2.7 kg	Horizontal: 11 lbs / 5 kg Vertical: 1.1 lbs / 0.5 kg	Horizontal: 105 lbs / 48 kg Vertical: 22 lbs / 10 kg

Item #	NRT100(/M)	NRT150(/M)	LTS150C(/M)	LTS300C(/M)	MLJ250(/M)
Positioning Performance	On-Axis Accuracy: 2.0 µm (Typical) 5.0 µm (Max)		Absolute On-Axis Accuracy: 20 µm Calibrated Accuracy: < ±5.0 µm		Unidirectional Repeatability: <10 µm
Mounting Holes	1/4"-20 (M6), 8 Places		1/4"-20 (M6), 16 Places		1/4"-20 (M6 x 1.0), 25 Places
Load Capacity	Horizontal: 44 lbs / 20 kg Vertical: 11 lbs / 5 kg		Horizontal: 33.1 lbs / 15 kg Vertical: 8.8 lbs / 4 kg		44 lbs / 20 kg

Item #	MT1-Z9 (MT1/M-Z9), MT3-Z9 (MT3/M-Z9)	PT1-Z9 (PT1/M-Z9), PT3-Z9 (PT3/M-Z9)	MTS25-Z8 (MTS25/M-Z8), KMTS25E(/M) (Stage + Controller)	MTS50-Z8 (MTS50/M-Z8), KMTS50E(/M) (Stage + Controller)
Bidirectional Repeatability	Uncompensated: 13 µm	Uncompensated: ±7 µm Compensated: ±0.8 µm	1.6 µm
Mounting Holes	1/4"-20 (M6), 7 Places	1/4"-20 (M6), 16 Places	4-40 (M3), 18 Places 8-32 (M4), 1 Place
Load Capacity	Vertical (Motor Pushing Down): 4.4 lbs (2.0 kg) Vertical (Motor Pushing Up): 10 lbs (4.5 kg) Horizontal: 20 lbs (9.0 kg)	Vertical (Motor Pushing Down): 7 lbs (3.2 kg) Vertical (Motor Pushing Up): 10 lbs (4.5 kg) Horizontal:20 lbs (9.0 kg)	Horizontal: 25 lbs / 12 kg Vertical: 10 lbs / 4.5 kg

Item #	M30X(/M)	M30XY(/M)	M150XY(/M)	KVS30
Bidirectional Repeatability	±1.0 µm		±0.25 µm	±0.12 µm
Mounting Holes	1/4"-20 (M6), 25 Places		1/4"-20 (M6 x 1.0 mm), 117 Places	1/4"-20 (M6), 25 Places 8-32 (M4), 16 Places
Load Capacity	Horizontal: 11.02 lbs / 5.0 kg Vertical: 4.41 lbs / 2.0 kg		22.0 lbs / 10 kg	15.4 lbs / 7.0 kg

Item #	DDS050(/M)	DDS100(/M)	DDS220(/M)	DDS300(/M)	DDS600(/M)
Bidirectional Repeatability	±1.5 µm		±0.25 µm
Mounting Holes	8-32 (M4), 10 Places 1/4"-20 (M6), 6 Places		4-40 (M3), 4 Places 8-32 (M4), 4 Places 1/4"-20 (M6), 5 Places	8-32 (M4), 16 Places 1/4"-20 (M6), 25 Places
Load Capacity	1.98 lbs / 0.9 kg		6.6 lbs / 3.0 kg	22.0 lbs / 10.0 kg

Label^a	Holes/Slots Pattern^b	Spacing^b (Stage Compatibility)	Threading Depth	Places
A	1/4"-20 (M6)	1" x 2" (25 x 50 mm)	Through	6
B	Ø2 mm Dowel Pin Holes	16 x 16 mm	1.5 mm	4
C	4-40	30 x 30 mm (Item #s PDR1(/M), PDR1V(/M))	3.5 mm	4
D	1/4" (M6) Counterbored Slot	1" to 2" (25 to 50 mm)	N/A	4
E	00-90 (M1.2)	10 x 10 mm (Item #s PD2(/M), PDX2(/M))	3 mm	4
F	#8 (M4) Counterbored Slot	1.25" (31.25 mm)	N/A	1
G	2-56 (M2)	27.0 x 23.4 mm (Item #s PDXZ1(/M), PD1 (/M ), PD1V(/M), PD1D(/M), PDX1 (/M ), PDX1A(/M), PDX1AV(/M), PDR1C(/M)) / 40.8 x 30 mm	7 mm	8
H	8-32 (M4)	2" (50 mm) (Item # PD3(/M)) / 2" x 2" (50 x 50 mm) (Item # PDXR1(/M))	7.8 mm	4

Item #	Qty	Description
PD1	3	ORIC 20 mm Linear Stage with Piezoelectric Inertia Drive, Imperial
PD1Z	1	Right-Angle Bracket Adapter for 20 mm Piezo Inertia Stage, Imperial

Item #	Qty	Description
PD1/M	3	ORIC 20 mm Linear Stage with Piezoelectric Inertia Drive, Metric
PD1Z/M	1	Right-Angle Bracket Adapter for 20 mm Piezo Inertia Stage, Metric

Item #	Qty	Description
XPCM1	1	30 mm Cage System Mount for Imperial PD1 Series Piezo Inertia Stages or PD2U Adapter
PD1	1	ORIC 20 mm Linear Stage with Piezoelectric Inertia Drive, Imperial
PD1FM	1	Ø1" Optic Mount for PD1 Series Piezoelectric Inertia Stages
CP33	2	SM1-Threaded 30 mm Cage Plate, 0.35" Thick, 2 Retaining Rings, 8-32 Tap
ER4-P4	1	Cage Assembly Rod, 4" Long, Ø6 mm, 4 Pack
TR3	2	Ø1/2" Optical Post, SS, 8-32 Setscrew, 1/4"-20 Tap, L = 3"
PH3E	2	Ø1/2" Pedestal Post Holder, Spring-Loaded Hex-Locking Thumbscrew, L=3.19"

Item #	Qty	Description
XPCM1/M	1	30 mm Cage System Mount for Metric PD1 Series Piezo Inertia Stages or PD2U/M Adapter
PD1/M	1	ORIC 20 mm Linear Stage with Piezoelectric Inertia Drive, Metric
PD1FM	1	Ø1" Optic Mount for PD1 Series Piezoelectric Inertia Stages
CP33/M	2	SM1-Threaded 30 mm Cage Plate, 0.35" Thick, 2 Retaining Rings, M4 Tap
ER4-P4	1	Cage Assembly Rod, 4" Long, Ø6 mm, 4 Pack
TR75/M	2	Ø12.7 mm Optical Post, SS, M4 Setscrew, M6 Tap, L = 75 mm
PH75E/M	2	Ø12.7 mm Pedestal Post Holder, Spring-Loaded Hex-Locking Thumbscrew, L=79.7 mm

Key Specifications^a
Item #	KIM001	KIM101
Piezoelectric Outputs (SMC Male)	One	Four
Piezo Output Voltage	85 to 125 VDC	85 to 125 VDC per Channel
Top Panel Controls	Scroll Wheel	Dual-Axis Joystick
External Input (SMA Female)	±10 V ± 2%
Input Power	+15 VDC @ 2 A
Housing Dimensions^b (W x D x H)	60.0 mm x 60.0 mm x 47.0 mm (2.36" x 2.36" x 1.85")	121.0 mm x 60.0 mm x 47.0 mm (4.76" x 2.36" x 1.85")
Compatible Software	Kinesis
Compatible Piezo Inertia Stages^c	5 mm Linear Stage, 20 mm Linear Stages, 50 mm Linear Stage, & Rotation Stages

Key Specifications^a
SMC Port	Number of Ports	Two
	Voltage	0 to 40 V
	Frequency	20 kHz Max
D-Sub Port	Number of Ports	One
	Voltage	-10 to 50 V
	Frequency	20 kHz Max
Max Current Limit		10 A
Front USB		Type A, USB Host 2.0
Back USB		Type B, USB Device 2.0
Voltage of Analog In/Out		-10 to 10 V, ±2%
Voltage of Trigger In/Out		0 to 5 V, TTL
Input Power		100 - 240 VAC, 50 - 60 Hz

Key Specifications^a
Performance Specifications^a
D-sub Port	Number of Ports	One
	Voltage	0 to 56 V
	Frequency	20 kHz Max
Max Current Limit		10 A
Front USB		Type A, USB HID Host
Back USB		Type B, USB Device 2.0
I/O Port	Voltage of Analog In/Out	-10 to 10 V, ±2%
I/O Port	Voltage of Trigger In/Out	0 to 5 V, TTL
Ethernet PC Communication		One RJ-45 Port
Dimensions (L x W x H)		115.2 mm x 150.0 mm x 48.5 mm (4.54” x 5.91” x 1.91”)
Weight		0.53 kg
Input Power		12 V, 3 A DAC

ORIC® 20 mm Linear Translation Stages with Piezoelectric Inertia Drive

Features

Piezoelectric Inertia "Stick-Slip" Motor

PD1(/M) & PD1D(/M)Stages

SMC Female

PD1V(/M) Stage

Flying Leads

Additional Cable withFemale SMC Connector*

PDX1(/M) Stage

Female 15-Pin D-Sub

PDX1A(/M) Stage

Female 15-Pin D-Sub

PDX1AV(/M) Stage

PDX1AV(/M) Encoder Cable Wire Diagram

Flying Leads

Female 15-Pin D-Suba

Software

Software

Achieving the Specified Performance

Kinesis© Software Control with a K-Cube Controller

KIMx01 Front Panel Control and Related Settings in Kinesis

Motorized Linear Translation Stages

Piezo Stages

Stepper Motor Stages

DC Servo Motor Stages

Direct Drive Stages

20 mm Linear Stage with Piezo Inertia Drive

20 mm Linear Stage with Piezo Inertia Drive, Vacuum Compatible

20 mm XY Stage with Piezo Inertia Drive

20 mm Linear Stage with Piezo Inertia Drive and Optical Encoder

20 mm Linear Stage with Piezo Inertia Drive and Optical Encoder, Low Profile

20 mm Linear Stage with Piezo Inertia Drive and Optical Encoder, Low Profile, Vacuum Compatible

Adapter Plates

Mounting Adapters

Universal Mounting Adapter for ORIC Stages

Right-Angle Bracket Adapter

Hardened Dowel Pins

30 mm Cage System Adapter and Optic Mount

K-Cube™ Controllers for Piezo Inertia Stages and Actuators

Compatible Power Supply

ORIC® Piezo Inertia Stage Controller

Compact ORIC® Piezo Inertia Stage Controller

Extension Cable for PDXC or PDXC2 Piezo Inertia Stage Controller

Female D-Type to Male SMC Piezo Drive Cable for PDXC2 Piezo Inertia Stage Controller

PD1(/M) & PD1D(/M)
Stages

Additional Cable with
Female SMC Connector*

Female 15-Pin D-Sub^a

Kinesis^© Software Control with a K-Cube Controller

ORIC^® Piezo Inertia Stage Controller

Compact ORIC^® Piezo Inertia Stage Controller