ORIC® 12 mm Linear Translation Stage with Piezoelectric Inertia Drive


  • 12 mm Linear Stages with Open- or Closed-Loop Positioning
  • 1 kg Horizontal Load Capacity
  • Stackable Design for Compact 1-, 2-, or 3-Axis Setups

U.S. Patent 11,606,045

PDX4

Piezo Inertia Stage
with Optical Encoder

Application Idea

Three PDX4/M Stages in an XYZ Configuration
Using a PD4Z/M Right Angle Bracket

PD4U(/M)

#8 (M4) Counterbored
Adapter Plate

PD4T(/M)

8-32 (M4 x 0.7) Threaded
Adapter Plate

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Click to Enlarge

Figure 1.1  Two PDX4(/M) translation stages can be mounted orthogonally to create an XY configuration.

Features

  • Compact Stainless Steel Stages with Piezo Inertia Drives
  • Ideal for OEMs and Set-and-Hold Applications that Require Relative Positioning with High Resolution
  • Top Plate Adapters Provide Alternative Mounting Hole Patterns
  • Mounting Adapter Provides Flat Surface for Mounting the Stage
  • Right-Angle Bracket Adapter Allows Vertical Mounting and XYZ Configurations
  • Requires a Piezo Inertia Stage Controller (Sold Separately Below)

Thorlabs' PDX4(/M) ORIC® Piezoelectric Inertia Drive Stage (U.S. Patent 11,606,045) provides fast and stable piezo-controlled linear motion in a compact package with no backlash. This stage has a horizontal load capacity of 1 kg (2.20 lbs). The piezo inertia drive is self-locking when the stage is at rest and no power is supplied to the piezo, making the stage ideal for set-and-hold applications that require nanometer resolution and long-term alignment stability.

Load Mounting Options
The load can be secured to the stage's moving platform using 00-90 (M1.2 x 0.25) threaded mounting holes. Alternatively, the PD4T(/M) and PD4U(/M) adapter plates (sold separately below) provide alternative mounting hole patterns for the top plate of the stage. The load can also be aligned using the six included dowel pins and the array of Ø0.04" (Ø1.0 mm), 0.06" (1.5 mm) deep dowel pin holes; see the drawings below for details. Ensure that the maximum insertion depth of these holes is not exceeded or else the stage may be damaged. If replacement dowel pins are needed, please contact Tech Support. For more information, please refer to the Specs tab or the support documents accessible through the red Support Docs icons () below.

Stage Mounting Options
Four 00-90 (M1.2 x 0.25) mounting counterbores are accessible when the moving plate is translated to the ends of the travel range. These counterbores can be used for mounting to our PD4T(/M), PD4U(/M), PD1B3(/M), or PD4Z(/M) adapter plates via the included 00-90 (M1.2 x 0.25) slotted pan head screws. The recommended mounting torque is 0.03 N·m. We offer the TD24 torque driver for tightening to a specific torque value.

The stage should be mounted on an even surface with recommended flatness ≤5 μm. If the stage is mounted on a surface with >5 µm flatness (as with most breadboards and optical tables), the mounting torque may need to be decreased in order for the velocity variation and pitch/yaw of the stage to meet specifications. The PD4T(/M), PD4U(/M), PD1B3(/M), and PD4Z(/M) mounting adapters provide a mounting surface with precise flatness to avoid warping the stage when mounting it to a table surface.

Two linear stages can be stacked on top of each other for an XY configuration for applications that require additional movement; an example is shown in Figure 1.1. The stage can also be mounted to 8-32 (M4 x 0.7) threaded components using our PD4T(/M) or PD4U(/M) adapter plates. The PD4Z(/M) right-angle bracket adapter allows one single-axis stage to be mounted vertically on top of another stage for an XZ or XYZ configuration. Alternatively, the bracket and single-axis stage can be used with a PD1B3(/M) adapter for a Z-configuration that can be directly mounted to an optical table or breadboard. Note that when the stage is mounted vertically, its load capacity is greatly reduced. 

Compatibility with Other ORIC Stages
An XZ or XYZ configuration can also be created by mounting a PDX4(/M) stage onto the top platform of a PDXZ1(/M) piezo inertia stage, which provides 4.5 mm of vertical motion. A PD4T(/M) or PD4U(/M) mounting adapter can be used to connect the PDX4(/M) to a PD1T mounting adapter, which then mounts directly to the PDXZ1(/M) stage. When a larger travel range is necessary, the 12 mm linear stage can also be mounted onto our ORIC 50 mm linear stage with an adapter plate.

Required Controller
One of our PDCX or PDXC2 piezo inertia controllers (sold below) is required to operate these stages. Note that the piezo inertia drives cannot be driven using a standard piezo controller. Please see below for more information on controller compatibility.

Inertia Motor Operation
Click to Enlarge

Figure 1.2  Simplified Illustration Showing the Operation of the Piezo Inertia Drive
Inertia Motor Operation
Figure 1.3  The "stick-slip" cycle consists of a slow piezo expansion and a fast piezo contraction.

Piezoelectric Inertia "Stick-Slip" Motor

The piezo inertia motor consists of three main parts: a flexure-coupled piezo actuator, a friction element, and a slider (the moving platform) as shown in Figure 1.2. During the "stick" part of a cycle, the piezo slowly expands under the ramp voltage, pushing the friction element and the slider forward in unison. During the "slip" part, the drive voltage drops rapidly and the piezo element returns to its starting length, with the friction element "slipping" backward. The slider does not move due to its inertia and the low coefficient of kinetic friction between the friction element and the bottom surface of the slider. The graph in Figure 1.3 shows the piezo drive voltage during one "stick-slip" cycle.

Repeating this cycle produces continuous forward travel of the slider. For travel in the reverse direction, the opposite drive voltage pattern is required, resulting in rapid piezo expansion and slower piezo contraction, or "slip-stick". During operation, the stage makes a high pitch noise and may generate some heat. This is normal behavior in the performance of the device and does not indicate a fault condition.

Due to a number of factors that include the application conditions, piezo hysteresis, component variance, and the axial load, the achieved step size will vary and is not repeatable. To help overcome this variance, an external feedback system will be necessary.

PDX4(/M) Stage Specificationsa
Driving Controller PDXC or PDXC2 Benchtop Controllers
Travel 12.0 mm (0.47")
Minimum Incremental Motionb 300 nm
Step Size Adjustabilityc 10 nm to 6 mm
Typical Settling Time 500 ms
Maximum Step Frequency 20 kHz
Speed (Continuous Stepping)b 15 mm/s Typical
Average Speed Variation Over Travel Rangeb
±2%
Optical Encoder Resolution 12.5 nm
Bidirectional Repeatability ±0.75 μm
Absolute Accuracy ±2.5 μm
Horizontal Load Capacity 1 kg (2.20 lbs)
Vertical Load Capacityd 100 g (3.5 oz)
Clamping / Holding Force 3 N
Pitch / Yaw Over Travel Range 400 µrad
XY Stacked Orthogonality <5 mrad
Motor Type Piezoelectric Inertia Drive
Lifetimee ≥25 km
Piezo Specifications
Max Operating Voltage 60 V
Capacitance 65 nF
Physical Specifications
Operating Temperature 10 to 40 °C
Connector Type 15-Pin D-Sub Female
Cable Lengthf Integrated Cable: 1.5 m (4.9 ft),
PDXCE Cable (Optional, Not Included): 3 m (9.8 ft)
Top Plate
Mounting Options
Thirteen 00-90 (M1.2 x 0.25) Threaded Holes, 1.9 mm (0.07") Deep
Nineteen Ø1.0 mm (Ø0.04") Dowel Pin Holes, 1.5 mm (0.06") Deep
PD4T(/M) and PD4U(/M) Adapters
PD2FM5 Ø1/2" Fixed Optic Mount
Dimensions (L x W x H) 23.0 mm x 19.7 mm x 9.0 mm
(0.91" x 0.78" x 0.35")
Weight (Including Cable) 58 g (2.05 oz)
Required Controller
(Sold Separately Below)
PDXC or PDXC2
  • The stage should be stored at room temperature with a relative humidity <40%.
  • Specified at 20 kHz Driving Frequency and In Closed-Loop Mode
  • This parameter is set by the controller and is not an intrinsic performance specification of the stage. This is adjusted by changing the piezo drive voltage amplitude and frequency - see the PDXC and PDXC2 controllers’ manuals for more details.
  • This is equivalent to the push/pull force along the axial/travel direction, which is 1 N.
  • Long-term operation (>1 km distance) when mounted vertically may cause rail creep, leading to a reduced travel range. To restore the stage performance, we recommend mounting the stage horizontally after approximately 0.5 km of use in a vertical orientation and translating it back and forth across the full travel range several times. Long-term use of the stage in a small range (≤10% of the full stroke) will lead to uneven wear of friction parts and cause a reduced lifetime.
  • When using a PDXCE extension cable, with a length of 3 m (9.8 ft), the total cable length is 4.5 m (14.8 ft). Due to the capacitance of the cables, do not use cables longer than 4.5 m in total.

PDX4(/M) Stage

Female 15-Pin D-Sub

D-Sub 15
Pin(s) Voltage Range Name Description
1 -7.5 to +12.5 V Encoder_B_N Encoder B-
2 -7.5 to +12.5 V Encoder_B_P Encoder B+
3 0 V GND Digital Ground
4 -7.5 to +12.5 V Encoder_A_N Encoder A-
5 -7.5 to +12.5 V Encoder_A_P Encoder A+
6 - - Reserved
7 - - Reserved
8 +5 V +5 V 5 V Power
9 -7.5 to +12.5 V Encoder_Z_N Encoder Z-
10 -7.5 to +12.5 V Encoder_Z_P Encoder Z+
11 - - Reserved
12 0 V PGND Power Ground
13 -10 to +50 V SigOut1 Piezo Output
14 5 V TTL EEPROM 1-Wire EEPROM
15 - - Reserved

Software

PDXC Version 2.2.1

The PDXC Software Package, which includes a GUI, drivers, and LabVIEW™/C++/Python SDK for third-party development.

Software Download

Thorlabs offers the PDXC software package to interface with the PDXC Piezo Stage Controller. This controller is designed to drive the following piezo inertia stages:

  • PDXZ1(/M) 4.5 mm Vertical Stage with Optical Encoder
  • PD2(/M) 5 mm Linear Stage
  • PDX2(/M) 5 mm Linear Stage with Optical Encoder
  • PDX4(/M) 12 mm Linear Stage with Optical Encoder
  • PD1(/M) 20 mm Linear Stage
  • PD1V(/M) Vacuum-Compatible 20 mm Linear Stage
  • PD1D(/M) 20 mm Monolithic XY Stage
  • PDX1(/M) 20 mm Linear Stage with Optical Encoder
  • PDX1A(/M) 20 mm Low-Profile, Linear Stage with Optical Encoder
  • PDX1AV(/M) Vacuum-Compatible 20 mm Low-Profile, Linear Stage with Optical Encoder
  • PD3(/M) 50 mm Linear Stage
  • PDR1C(/M) Rotation Stage
  • PDXR1(/M) Rotation Stage with Optical Encoder

The software package allows two methods of usage: graphical user interface (GUI) utilities for direct interaction with and control of the controllers 'out of the box', and a set of programming interfaces for third-party development of custom-integrated positioning and alignment solutions to be easily programmed in the development language of choice (LabVIEW™/C++/Python SDK).

Software

Kinesis Version 1.14.52

The Kinesis Software Package, which includes a GUI for control of Thorlabs' Kinesis system controllers.

Also Available:

  • Communications Protocol
Software Download
Kinesis Software
Figure 58A  Kinesis GUI Screen

Thorlabs offers the Kinesis® software package to drive our wide range of motion controllers. The software can be used to control devices in the Kinesis family, which covers a wide variety of motion controllers ranging from small, low-powered, single-channel drivers (such as the K-Cubes™) to high-power, multi-channel benchtop units and modular 19" rack nanopositioning systems (the MMR60x Rack System).

The Kinesis Software features .NET controls which can be used by 3rd party developers working in the latest C#, Visual Basic, LabVIEW™, or any .NET compatible languages to create custom applications. Low-level DLL libraries are included for applications not expected to use the .NET framework and APIs are included with each install. A Central Sequence Manager supports integration and synchronization of all Thorlabs motion control hardware.

By providing this common software platform, Thorlabs has ensured that users can mix and match any of our motion control devices in a single application, while only having to learn a single set of software tools. In this way, it is perfectly feasible to combine any of the controllers from single-axis to multi-axis systems and control all from a single, PC-based unified software interface.

The software package allows two methods of usage: graphical user interface (GUI) utilities for direct interaction with and control of the controllers 'out of the box', and a set of programming interfaces that allow custom-integrated positioning and alignment solutions to be easily programmed in the development language of choice. 

Thorlabs' Kinesis® software features new .NET controls which can be used by third-party developers working in the latest C#, Visual Basic, LabVIEW™, or any .NET compatible languages to create custom applications.

C#
This programming language is designed to allow multiple programming paradigms, or languages, to be used, thus allowing for complex problems to be solved in an easy or efficient manner. It encompasses typing, imperative, declarative, functional, generic, object-oriented, and component-oriented programming. By providing functionality with this common software platform, Thorlabs has ensured that users can easily mix and match any of the Kinesis controllers in a single application, while only having to learn a single set of software tools. In this way, it is perfectly feasible to combine any of the controllers from the low-powered, single-axis to the high-powered, multi-axis systems and control all from a single, PC-based unified software interface.

The Kinesis System Software allows two methods of usage: graphical user interface (GUI) utilities for direct interaction and control of the controllers 'out of the box', and a set of programming interfaces that allow custom-integrated positioning and alignment solutions to be easily programmed in the development language of choice.

For a collection of example projects that can be compiled and run to demonstrate the different ways in which developers can build on the Kinesis motion control libraries, click on the links below. Please note that a separate integrated development environment (IDE) (e.g., Microsoft Visual Studio) will be required to execute the Quick Start examples. The C# example projects can be executed using the included .NET controls in the Kinesis software package (see the Kinesis Software tab for details).

C Sharp Icon Click Here for the Kinesis with C# Quick Start Guide
Click Here for C# Example Projects
Click Here for Quick Start Device Control Examples
C Sharp Icon

LabVIEW
LabVIEW can be used to communicate with any Kinesis-based controller via .NET controls. In LabVIEW, you build a user interface, known as a front panel, with a set of tools and objects and then add code using graphical representations of functions to control the front panel objects. The LabVIEW tutorial, provided below, provides some information on using the .NET controls to create control GUIs for Kinesis-driven devices within LabVIEW. It includes an overview with basic information about using controllers in LabVIEW and explains the setup procedure that needs to be completed before using a LabVIEW GUI to operate a device.

Labview Icon Click Here to View the LabVIEW Guide
Click Here to View the Kinesis with LabVIEW Overview Page
Labview Icon

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Motorized Linear Translation Stages

Thorlabs' motorized linear translation stages are offered in a range of maximum travel distances, from a stage with 20 µm of piezo translation to our 600 mm direct drive stage. Many of these stages can be assembled in multi-axis configurations, providing XY or XYZ translation. For fiber coupling applications, please see our multi-axis stages, which offer finer adjustment than our standard motorized translation stages. In addition to motorized linear translation stages, we offer motorized rotation stages and goniometers. We also offer manual translation stages.

Piezo Stages

These stages incorporate piezoelectric elements in a variety of drive mechanisms. ORIC® stages incorporate piezo inertia drives that use "stick-slip" friction properties to obtain extended travel ranges. Our modular, quick-connect XR25 series translation stage can be driven by the PIA25 piezo inertia actuator which operates using the same principle. Our Nanoflex™ translation stages use standard piezo chips along with manual actuators. Elliptec® stages use resonant piezo motors to push and pull the moving platform through resonant elliptical motion. Our LPS710E z-axis stage features a mechanically amplified piezo design and includes a matched controller.

Piezoelectric Stages
Product Family ORIC®
PDXZ1 Closed-Loop
4.5 mm Vertical Stage
ORIC®
PD2 Open-Loop
5 mm Stage
ORIC®
PDX2 Closed-Loop
5 mm Stage
ORIC®
PDX4 Closed-Loop
12 mm Stage
Click Photo
to Enlarge
Travel 4.5 mm 5 mm 12 mm
Speed 1 mm/s (Typ.)a 10 mm/s (Typ. Max)b 8 mm/s (Typ.)c 15 mm/s (Typ.)a
Drive Type Piezoelectric Inertia Drive
Possible Axis Configurations Z X, XY, XYZ
Mounting
Surface Size
45.0 mm x 42.0 mm 13.0 mm x 13.0 mm 13.0 mm x 23.0 mm
Additional Details
  • Specified at 20 kHz Driving Frequency and in Closed-Loop Mode
  • Specified using PDXC and PDXC2 Benchtop Controllers. For performance when controlled with a KIM001 or KIM101 K-Cube Controller, see the Specs tab of the PD2 or PD3 stage presentation.
  • Specified using PDXC and PDXC2 Benchtop Controllers.

Piezoelectric Stages
Product Family ORIC®
PD1 Open-Loop
20 mm Stage
ORIC®
PD1D Open-Loop
20 mm Monolithic XY Stage
ORIC®
PDX1 Closed-Loop
20 mm Stage
ORIC®
PD3 Open-Loop
50 mm Stage
Click Photo
to Enlarge
Travel 20 mm 50 mm
Speed 3 mm/s (Typ. Max)a 20 mm/s (Typ. Max)b 10 mm/sc
Drive Type Piezoelectric Inertia Drive
Possible Axis Configurations X, XY, XYZ XY, XYZ X, XY, XYZ X, XY, XYZ
Mounting Surface Size 30 mm x 30 mm 80 mm x 30 mm
Additional Details
  • Specified using KIM101 K-Cube Controller.
  • Specified using PDXC and PDXC2 Benchtop Controllers.
  • Specified using PDXC and PDXC2 Benchtop Controllers. For performance when controlled with a KIM001 or KIM101 K-Cube Controller, see the Specs tab of the PD2 or PD3 stage presentation.

Piezoelectric Stages
Product Family Nanoflex™
20 µm Stage
with 5 mm Actuator
Nanoflex™
25 µm Stage
with 1.5 mm Actuator
Modular XR25 Series
25 mm Stage
Elliptec® 28 mm Stage Elliptec® 60 mm Stage LPS710E 1.1 mm Vertical Stage
Click Photo
to Enlarge
Travel 20 µm + 5 mm Manual 25 µm + 1.5 mm Manual 25 mm 28 mm 60.0 mm 1.1 mm
Maximum Velocity - ≤3.6 mm/mina 180 mm/s 90 mm/s -
Drive Type Piezo with Manual Actuator Piezo Inertia Drive Resonant Piezoelectric Motor Amplified Piezo
Possible Axis Configurations X, XY, XYZ X, XY, YZ, XZ, XYZ X Z
Mounting Surface Size 75 mm x 75 mm 30 mm x 30 mm 110.0 mm x 75.7 mm 15 mm x 15 mm 21 mm x 21 mm
Additional Details
  • While travelling in one direction, each device's step size may vary by up to 20% and is not normally repeatable. Due to the open loop design, component variance, change of direction and application conditions may further increase the scale of the variance. That is for a given set of settings in Kinesis.
  • The PIA25 piezo inertia actuator is ideal for set-and-hold applications that require high-resolution relative positioning. For position readouts with 10.0 µm accuracy, we offer the ENCXR25 optical encoder (sold separately).

Stepper Motor Stages

These translation stages feature removable or integrated stepper motors and long travel ranges up to 300 mm. Many of these stages either have integrated multi-axis capability (PLSXY) or can be assembled into multi-axis configurations (PLSX, Quick-Connect XR25 Series, LNR Series, NRT Series, and LTS Series stages). The MLJ150 stage also offers high load capacity vertical translation.

Stepper Motor Stages
Product Family MVSN1(/M) 13 mm Vertical Stage PLS Series
1" Stages
Modular XR25 Series
25 mm Stage
LNR Series
25 mm Stage
LNR Series
50 mm Stage
Click Photo
to Enlarge
Travel 13 mm 1" (25.4 mm) 25 mm 25 mm 50 mm
Maximum Velocity 5.0 mm/s 7.0 mm/s 2.0 mm/s 2.0 mm/s 50 mm/s
Possible Axis Configurations Z X, XY X, XY, YZ, XZ, XYZ X, XY, XYZ X, XY, XYZ
Mounting Surface Size 24.5 mm x 50.0 mm 3" x 3" (76.2 mm x 76.2 mm) 110.0 mm x 75.7 mm 60 mm x 60 mm 100 mm x 100 mm
Additional Details

Stepper Motor Stages
Product Family NRT Series
100 mm Stage
NRT Series
150 mm Stage
LTS Series
150 mm Stage
LTS Series
300 mm Stage
MLJ250
50 mm Vertical Stage
Click Photo
to Enlarge
Travel 100 mm 150 mm 150 mm 300 mm 50 mm
Maximum Velocity 30 mm/s 50 mm/s 3.0 mm/s
Possible Axis Configurations X, XY, XYZ X, XY, XYZ Z
Mounting Surface Size 84 mm x 84 mm 100 mm x 90 mm 148 mm x 131 mm
Additional Details

DC Servo Motor Stages

Thorlabs offers linear translation stages with removable or integrated DC servo motors. These stages feature low profiles and many can be assembled in multi-axis configurations.

DC Servo Motor Stages
Product Family MT Series
12 mm Stages
PT Series
25 mm Stages
Modular XR25 Series
25 mm Stage
MTS Series
25 mm Stage
MTS Series
50 mm Stage
Click Photo
to Enlarge
Travel 12 mm 25 mm 25 mm 25 mm 50 mm
Maximum Velocity 2.6 mm/s 2.6 mm/s 2.4 mm/s
Possible Axis Configurations X, XY, XYZ X, XY, YZ, XZ, XYZ X, XY, XYZ
Mounting Surface Size 61 mm x 61 mm 101.6 mm x 76.2 mm 110.0 mm x 75.7 mm 43 mm x 43 mm
Additional Details

DC Servo Motor Stages
Product Family M30 Series
30 mm Stage
M30 Series
30 mm Monolithic
XY Stage
M150 Series
150 mm XY Stage
KVS30
30 mm Vertical Stage
Click Photo
to Enlarge
Travel 30 mm 150 mm 30 mm
Maximum Velocity 2.4 mm/s X-Axis: 170 mm/s
Y-Axis: 230 mm/s
8.0 mm/s
Possible Axis Configurations X, Z XY, XZ XY Z
Mounting Surface Size 115 mm x 115 mm 272.4 mm x 272.4 mm 116.2 mm x 116.2 mm
Additional Details

Direct Drive Stages

These low-profile stages feature integrated brushless DC servo motors for high speed translation with zero backlash. When no power is applied, the platforms of these stages have very little inertia and are virtually free running. Hence these stages may not be suitable for applications where the stage's platform needs to remain in a set position when the power is off. We do not recommend mounting these stages vertically.

Direct Drive Stages
Product Family DDS Series
50 mm Stage
DDS Series
100 mm Stage
DDS Series
220 mm Stage
DDS Series
300 mm Stage
DDS Series
600 mm Stage
Click Photo
to Enlarge
Travel 50 mm 100 mm 220 mm 300 mm 600 mm
Maximum Velocity 500 mm/s 300 mm/s 400 mm/s 400 mm/s
Possible Axis Configurations X, XY X, XY X X
Mounting Surface Size 60 mm x 52 mm 88 mm x 88 mm 120 mm x 120 mm
Additional Details
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12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder


Click for Details

Figure G1.1  This schematic shows the top plate mounting features of the PDX4(/M) linear stage. Dimensions for the metric stage are given in parentheses.

Includes:

  • Linear Stage with Integrated Cable, D-Sub Female Connector
  • Six 00-90 (M1.2 x 0.25) Slotted Pan Head Screws
  • Six Ø1 mm Dowel Pins
  • Individual Test Data Certificate
  • Open- and Closed-Loop Operation Supported
  • Optical Encoder Provides Resolution Up to 12.5 nm
  • <5 mrad XY Stacked Orthogonality
  • Moves at a Typical Speed of Up to 15 mm/s (Closed Loop)
  • Integrated 1.5 m (4.9 ft) Cable with D-Sub Female Connector
  • Requires the PDXC or PDXC2 Piezo Inertia Controller (Sold Separately Below)
  • Each Stage Individually Tested and Shipped with Test Data Certificate

This ORIC® piezo inertia stage with an optical encoder is able to operate in both open- and closed-loop modes, can support loads up to 1 kg, and operate at speeds up to 15 mm/s with no backlash. The piezo inertia drive is self-locking when the stage is at rest and no power is supplied to the piezo, making these actuators ideal for set-and-hold applications that require nanometer resolution and long-term alignment stability. See the Specs tab for detailed specifications. The configuration of mounting holes on the top plate of the stage is shown in Figure G1.1.

After each stage is manufactured, the pitch and yaw of the stage are tested. This ensures that each stage meets the stated specifications over the full translation range of the stage. A summary of the test results is provided on a data sheet that ships with each stage. A sample data sheet can be viewed here.

The stage should be placed on a surface with flatness ≤5 µm. The PD4T(/M), PD4U(/M), PD1B3(/M), and PD4Z(/M) mounting adapters (sold below) provide a mounting surface with precise flatness to avoid warping the stage when mounting it to a table or breadboard surface.

Each stage has an integrated 1.5 m cable with a 15-pin D-sub connector that can connect directly to a PDXC or PDXC2 controller. If additional cable length is needed, the 3 m long PDXCE Extension Cable (available separately below) can be used. Due to the capacitance of the cables, do not use cables longer than 4.5 m in total when connecting the stage to a PDXC or PDXC2 controller.

Note: The PDX4(/M) stage is only compatible with the PDXC and PDXC2 controllers. The stage's speed is adjusted by the voltage amplitude with constant 20 kHz driving frequency in both open-loop and closed-loop mode, or at lower driving frequencies using open-loop mode with the PDXC2 compact controller. Since 20 kHz is an inaudible frequency, under such conditions the stage operates quietly. At different driving frequencies, the stage may make a high-pitched noise or generate some heat; this is normal behavior in the performance of the device and does not indicate a fault condition.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
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PDX4NEW!ORIC 12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder, Imperial
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PDX4/MNEW!ORIC 12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder, Metric
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Adapter Plates

  • Additional Mounting Options with 8-32 (M4 x 0.7) Threaded Hole or #8 (M4) Counterbore
  • Same 23.0 mm x 13.0 mm Footprint as PDX4(/M) Stage Surface

These adapter plates provide alternative mounting holes for the PDX4(/M) stage. The PD4T(/M) adapter plate is 0.12" (3.0 mm) thick and features a central 8-32 (M4 x 0.7) threaded hole accessible from the bottom side of the plate, making it ideal for post mounting as shown in Figure G2.1. A PDX4(/M) 12 mm stage can be mounted to a PD1 series 20 mm linear stage using the PD4U(/M) adapter and a PD1T(/M) adapter. The PD4U(/M) adapter plate is 0.24" (6.0 mm) thick and features a central #8 (M4) counterbore, primarily designed to serve as a mounting adapter to provide a base with ≤5 µm flatness.

Each adapter matches the footprint of the PDX4(/M) stage and can be secured to the top or bottom of the stage using two 00-90 (M1.2 x 0.25) slotted pan head screws (included with the stage) and two Ø1 mm dowel pins (included with the stage). The top and bottom faces of both adapters provide features for compatibility with the PDX4(/M) stage and PD4Z(/M) bracket. The bottom faces (illustrated in the detailed versions of Figures G2.2 and G2.3) include eight #00 (M1.2) counterbores, four Ø1 mm dowel pin holes, and six 00-90 (M1.2 x 0.25) threaded through holes. The top faces (illustrated in Figures G2.2 and G2.3) feature six 00-90 (M1.2 x 0.25) threaded through holes, five Ø1 mm dowel pin holes, and one mounting slot for a Ø1 mm dowel pin, which provides 0.5 mm of alignment flexibility. The PD4T(/M) adapter bottom face also includes an 8-32 (M4 x 0.7) threaded mounting hole, while the PD4U(/M) adapter top face includes a counterbore for an 8-32 (M4 x 0.7) cap screw.


Click to Enlarge

View Imperial Product List
Item #QtyDescription
PDX41ORIC 12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder, Imperial
PD4T1Adapter Plate for 12 mm Piezo Inertia Stage, 3 mm Thick, 8-32 Mounting Hole
TR21Ø1/2" Optical Post, SS, 8-32 Setscrew, 1/4"-20 Tap, L = 2"
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PDX4/M1ORIC 12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder, Metric
PD4T/M1Adapter Plate for 12 mm Piezo Inertia Stage, 3 mm Thick, M4 x 0.7 Mounting Hole
TR50/M1Ø12.7 mm Optical Post, SS, M4 Setscrew, M6 Tap, L = 50 mm
Figure G2.1  The PDX4(/M) stage can be mounted on a Ø1/2" post using the PD4T(/M) adapter.

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Figure G2.2  A schematic is shown for the PD4T(/M) mounting adapter plate. Dimensions for the metric adapter plate are given in parentheses.

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Figure G2.3  A schematic is shown for the PD4U(/M) mounting adapter plate. Dimensions for the metric adapter plate are given in parentheses.
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PD4T Support Documentation
PD4TNEW!Adapter Plate for 12 mm Piezo Inertia Stage, 3 mm Thick, 8-32 Mounting Hole
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PD4U Support Documentation
PD4UNEW!Adapter Plate for 12 mm Piezo Inertia Stage, 6 mm Thick, #8 Counterbore
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PD4T/M Support Documentation
PD4T/MNEW!Adapter Plate for 12 mm Piezo Inertia Stage, 3 mm Thick, M4 x 0.7 Mounting Hole
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PD4U/M Support Documentation
PD4U/MNEW!Adapter Plate for 12 mm Piezo Inertia Stage, 6 mm Thick, M4 Counterbore
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Universal Mounting Adapter for ORIC Stages


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Figure G3.2  Mechanical Drawing for the PD1B3(/M) Adapter Plate. See Table G3.3 for descriptions of the hole labels. Dimensions for the metric version of the adapter plate are given in parentheses.

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Figure G3.1  PDX4 Stage Mounted to
PD1B3 Adapter
  • Provide Flat Surface for Mounting ORIC Stages
  • Passivated Stainless Steel Construction
  • Reduces Stage Warping When Mounting to Table or Breadboard
  • Dimensions (L x W x H): (65.0 mm x 65.0 mm x 10.0 mm)

Thorlabs' PD1B3(/M) Universal Adapter Plate provides a flat surface (flatness ≤5 µm) for mounting any of the ORIC piezo inertia stages. Mounting holes are labeled in the mechanical drawing in Figure G3.2 corresponding to Table G3.3. The four 4-40 threaded holes are 30 mm cage system compatible, and two 1/4"-20 (M6) screws are included for mounting to breadboards.

If the stage is mounted on a surface with >5 µm flatness (as with most breadboards and optical tables), the velocity variation and pitch/yaw of the stage may suffer due to the stage warping. Mounting the stage on the adapter drastically reduces the amount the stage warps when mounted on a table or breadboard with insufficient flatness. 

Table G3.3  Hole Descriptions
Labela Holes/Slots Patternb Spacingb (Stage Compatibility) Threading Depth Places
A 1/4"-20 (M6)  1" x 2" (25 x 50 mm) Through 6
B Ø2 mm Dowel
Pin Holes
16 x 16 mm 1.5 mm 4
C 4-40 30 x 30 mm (Item #s PDR1(/M), PDR1V(/M)) 3.5 mm 4
D 1/4" (M6) Counterbored Slot 1" to 2" (25 to 50 mm) N/A 4
E 00-90 (M1.2) 10 x 10 mm (Item #s PD2(/M), PDX2(/M), PDX4(/M)) 3 mm 4
F #8 (M4) Counterbored Slot 1.25" (31.25 mm) N/A 1
G 2-56 (M2) 27.0 x 23.4 mm (Item #s PDXZ1(/M), PD1(/M), PD1V(/M), PDX1(/M), PDX1A(/M),
PDX1AV(/M), PD1D(/M), PDR1C(/M))
/ 40.8 x 30 mm
7 mm 8
H 8-32 (M4) 2" (50 mm) (Item # PD3(/M)) / 2" x 2" (50 x 50 mm)
(Item # PDXR1(/M))
7.8 mm 4
  • See Figure G3.2 for Details
  • Holes and dimensions for the metric version of the adapter plate are given in parentheses.
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PD1B3 Support Documentation
PD1B3Universal Mounting Adapter for ORIC Piezo Inertia Stages, Imperial
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PD1B3/MUniversal Mounting Adapter for ORIC Piezo Inertia Stages, Metric
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Right-Angle Bracket Adapter


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Figure G4.2  PD4Z(/M) Bracket Schematic with Metric Bracket Dimensions Given in Parentheses

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Item #QtyDescription
PDX43ORIC 12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder, Imperial
PD4Z1Right-Angle Bracket for 12 mm Piezo Inertia Stage, Imperial
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Item #QtyDescription
PDX4/M3ORIC 12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder, Metric
PD4Z/M1Right-Angle Bracket for 12 mm Piezo Inertia Stage, Metric
Figure G4.1  Three PDX4(/M) stages can be mounted in an XYZ configuration using the PD4Z(/M) right-angle bracket.
  • Mounts PDX4(/M) Stage at 90° for Vertical or Horizontal Translation
  • Enables Vertical Z-, XZ-, or XYZ-Axis Configurations

The PD4Z(/M) right-angle bracket allows the user to mount a PDX4(/M) stage at 90°, as shown in Figure G4.1. The bracket can be secured to the top plate of the stage, a PD4T(/M) adapter, or PD4U(/M) adapter using two 00-90 (M1.2 x 0.25) slotted pan head screws and the #00 (M1.2) counterbored holes in the base of the bracket. The vertical stage can then be mounted on the bracket using a second set of pan head screws and dowel pins. Eleven 00-90 (M1.2 x 0.25) mounting holes and twelve Ø1 mm dowel pin holes are located on the larger (vertical) face for precise alignment (illustrated in Figure G4.2). The base has three Ø1 mm dowel pin holes and three mounting slots for Ø1 mm dowel pins providing 0.5 mm of alignment flexibility (illustrated in the detailed version of Figure G4.2).

Note: Long-term operation (>1 km distance) when mounted vertically may cause rail creep, leading to a reduced travel range. To restore the stage performance, we recommend mounting the stage horizontally after approximately 0.5 km of translation in a vertical orientation and translating it back and forth across the full travel range several times.

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PD4Z Support Documentation
PD4ZNEW!Right-Angle Bracket for 12 mm Piezo Inertia Stage, Imperial
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PD4Z/MNEW!Right-Angle Bracket for 12 mm Piezo Inertia Stage, Metric
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Ø1/2" Fixed Optic Mount


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Figure G5.2  PD2FM5 Fixed Optic Mount Stage Mounting Features

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Item #QtyDescription
PD2FM51Ø1/2" Optic Mount for PD2(/M) Piezoelectric Inertia Stages
LB40031f = 30.0 mm, Ø1/2" UV Fused Silica Bi-Convex Lens, Uncoated
PDX41ORIC 12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder, Imperial
PD4U1Adapter Plate for 12 mm Piezo Inertia Stage, 6 mm Thick, #8 Counterbore
TR21Ø1/2" Optical Post, SS, 8-32 Setscrew, 1/4"-20 Tap, L = 2"
View Metric Product List
Item #QtyDescription
PD2FM51Ø1/2" Optic Mount for PD2(/M) Piezoelectric Inertia Stages
LB40031f = 30.0 mm, Ø1/2" UV Fused Silica Bi-Convex Lens, Uncoated
PDX4/M1ORIC 12 mm Linear Stage with Piezoelectric Inertia Drive and Optical Encoder, Metric
PD4U/M1Adapter Plate for 12 mm Piezo Inertia Stage, 6 mm Thick, M4 Counterbore
TR50/M1Ø12.7 mm Optical Post, SS, M4 Setscrew, M6 Tap, L = 50 mm
Figure G5.1  The PDX4 stage with the PD2FM5 mount provides 12 mm of translation along the optical axis.
  • Mount Ø1/2" (12.7 mm) Optics to the PDX4(/M) Stage
  • Mount Optic at 0° or 90° to the Stage's Translation Axis
  • SM05-Threaded Optic Bore with Included POLARIS-SM05RR Retaining Ring
    • Mounts Ø1/2" Optics up to 0.15" (3.9 mm) Thick
  • Included Mounting Components: 
    • Two Ø1 mm x 3 mm Long Dowel Pins
    • Two 00-90 Brass, Slotted Round Head Screws
    • Two M1.2 Stainless Steel, Slotted Cheese Head Screws

The PD2FM5 Fixed Optic Mount is designed to hold a Ø1/2" optic up to 0.15" (3.9 mm) thick and can be mounted to the top platform of a PDX4(/M) 12 mm piezo inertia stage via four 00-90 (M1.2 x 0.25) threaded holes separated by 10.00 mm. When the PD2FM5 is mounted to the PDX4(/M) stage, the height to the optical axis is 24.55 mm.

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PD2FM5 Support Documentation
PD2FM5Ø1/2" Optic Mount for PD2(/M) Piezoelectric Inertia Stages
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ORIC® Piezo Inertia Stage Controller

Key Specificationsa
SMC Port Number of Ports Two
Voltage 0 to 40 V
Frequency 20 kHz Max
D-Sub Port Number of Ports One
Voltage -10 to 50 V
Frequency 20 kHz Max
Max Current Limit 10 A
Front USB Type A, USB Host 2.0
Back USB Type B, USB Device 2.0
Voltage of Analog In/Out -10 to 10 V, ±2%
Voltage of Trigger In/Out 0 to 5 V, TTL
Input Power 100 - 240 VAC, 50 - 60 Hz
  • For complete specifications, please see the manual by clicking the red Docs icon () below.
  • Controller for ORIC Piezo Inertia Linear Stages, PDXZ1(/M) Vertical Stage, and both PDR1C(/M) and PDXR1(/M) Rotation Stages
  • Supports Both Open- and Closed-Loop Operation
  • SMC and 15-Pin D-Sub Ports Available

This controller is designed to control our ORIC piezo-inertia-driven linear stages, PDXZ1(/M) vertical stage, and both PDR1C(/M) and PDXR1(/M) rotation stages. It offers two channels that support open-loop stage control using SMC outputs and one channel that can provide open- or closed-loop stage control using a 15-pin D-sub output. If a longer connection is required for ORIC stages with a D-Sub connector, the PDXCE Extension Cable can be used (sold separately below).

Embedded software allows this unit to be fully controlled using the buttons, LCD display, and knob on the front panel. Alternatively, built-in external trigger modes support single-channel operation. By connecting multiple controllers together, multi-channel operation in D-sub mode such as a raster scan is possible. Users can select the output port(s), switch between open-loop and closed-loop modes, and perform homing and encoder calibration without being connected to a PC. In addition to these on-unit controls, USB connectivity provides simple PC-control with our available software platform.

The unit comes with a compatible region-specific power cord. For all applications, use an IEC320 compatible power cord fitted with a plug appropriate for your particular power socket. Ensure the line voltage rating marked on the rear panel agrees with your local power supply. 

For more information, please see our full web presentation.

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PDXC Support Documentation
PDXCMulti-Stage ORIC® Piezo Inertia Stage Controller
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Compact ORIC® Piezo Inertia Stage Controller

Key Specificationsa
Performance Specificationsa
D-sub Port Number of Ports One
Voltage 0 to 56 V
Frequency 20 kHz Max
Max Current Limit 10 A
Front USB Type A, USB HID Host
Back USB Type B, USB Device 2.0
I/O Port Voltage of Analog In/Out -10 to 10 V, ±2%
Voltage of Trigger In/Out 0 to 5 V, TTL
Ethernet PC Communication One RJ-45 Port
Dimensions (L x W x H) 115.2 mm x 150.0 mm x 48.5 mm
(4.54” x 5.91” x 1.91”)
Weight 0.53 kg
Input Power 12 V, 3 A DAC
  • For complete specifications, please see the manual by clicking the red Docs icon () below.
  • Controller for ORIC Piezo Inertia Linear Stages, PDXZ1(/M) Vertical Stage, and both PDR1C(/M) and PDXR1(/M) Rotation Stages
  • Compact Design and PC Control with Kinesis® Software 
  • Supports Both Open- and Closed-Loop Operation
  • Energy Efficient Switch Amplifier Circuit Outputs Peak Current of 10 A
  • Configurable High Speed Communication Interfaces: USB 2.0, Gigabit Ethernet, Digital I/0, Analog I/0
  • 800 Hz to 20 kHz Pulse Rate Range

The PDXC2 compact controller is designed for our ORIC piezo-inertia-driven linear stages, PDXZ1(/M) vertical stage, and both PDR1C(/M) and PDXR1(/M) rotation stages. It features one channel that supports open- or closed-loop stage control using a 15-pin D-sub output. The PDXC2AD D-sub to SMC adapter cable can be used to operate stages with an SMC connection in open-loop mode. 

The PDXC2 controller is connected to PC by either the USB or ethernet ports on the back panel of the controller. All the operating parameters and operations, such as switching between open- and closed-loop modes, performing homing operation, and parameter optimization are controlled by PC with the Kinesis® software (available for download on the Kinesis Software tab above). Settings such as trigger modes and movement parameters can be configured for operations such as raster scans. Calibration for specific ORIC stages with encoders (Item #s PDX1(/M), PDX1A(/M), PDX1AV(/M), and PDXR1(/M) only) is performed with the PDXC2 Calibration Tool found on the Motion Control Software page. Please see the user manual for details. Command-line control is also possible through the USB and RS-232 ports.

The PDXC2 unit is powered by the included DS12 12 VDC power adapter, which operates at an input voltage of 100 - 240 VAC and ships with a region-specific AC cable. For all applications, use an IEC320 compatible power cord fitted with a plug appropriate for your particular power socket. Make sure that the line voltage rating marked on the power adapter agrees with your local power supply.

For more information, please see our full web presentation.

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PDXC2 Support Documentation
PDXC2Customer Inspired! Compact Single Stage ORIC® Piezo Inertia Stage Controller
$1,734.00
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Extension Cable for PDXC or PDXC2 Piezo Inertia Stage Controller


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DB15 Male to DB15 Female

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Mechanical Drawing

The PDXCE extension cable provides 3000.0 mm (118.11") of extra cord length, if needed, when connecting ORIC stages with a Female D-Sub Connector to the PDXC or PDXC2 ORIC Inertia Stage Controllers. Due to the capacitance of the cables, each stage has a recommended maximum cable length. Please check individual stage specifications before adding extension cables.

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PDXCE Support Documentation
PDXCECustomer Inspired! Extension Cable for ORIC® Piezo Stages with a D-Sub Connector, 3.0 m, DB15 Male to DB15 Female
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